XYナノ位置決めテーブルシステム(S60-2 生産システムの新展開(2),S60 生産システムの新展開)

概要

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Within recent manufacturing environment, there is an increasing demand for nanometer positioning table system with high stiffness, high resolution and high repeatability. In this study, therefore, XY nano positioning table system has been developed. The table is levitated by aerostatic bearings with porous material and driven by six voice coil motors in a non-contact condition. The table system is designed symmetrically about the driving axis and consequently free from nonlinear befavior and direction dependency. The performance of the developed table system has been verified through a series of nano-positioning experiments.
2004-09-04