F-0601 マイクロセンサによる加工点近傍の熱流束計測(S41-1 生産システムにおけるハードウェア技術(1))(S41 生産システムにおけるハードウェア技術)

概要

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Future ultraprecision manufacturing systems equire intelligent machine tools equipped with effective in-process monitoring systems for machining environment. To meet the requirements, the sensor which has properties such as multifunctionality, reliability, sensitiviness and compactness, is urgently required. Especially, it is difficult to monitor the machining status during ultraprecision machining because the emission of energy in the cutting point is very small. Therefore, we proposed the micro-sensor which can detect heat flux behaviour nearby cutting point. The proposed micro-sensor is made by micro-fabrication technique for semiconductor product and onto tool tip surface directly. In this study, the performance of the developed micro-sensor was proved through a series of ultraprecision cutting experiments.
一般社団法人日本機械学会の論文
2001-08-22