高速ナノメートル位置決めテーブルシステムに関する研究 : 繰返し制御による超精密位置決めの実現

概要

論文の詳細を見る
In order to realize higher machining accuracy and higher productivity, it is required to materialize the table system which has capabilities of nanometer order positioning accuracy and high speed feed drive. In particular, nanometer order tracking accuracy is urgently required in semiconductor production systems. Accordingly, it is increasing to apply a linear motor and aerostatic guideway to the table systems. The linear motor-driven aerostatic table system has the advantage of non-contact direct drive, however, disturbances such as the force ripple of the linear motor deteriorate directly tracking accuracy of the table. In this paper, therefore, the performances of the linear motor-driven aerostatic table system using a repetitive control method were evaluated. Furthermore, through a series of experiments, it was proved that the repetitive control method could restrain tracking error caused by various factors.
一般社団法人日本機械学会の論文
2001-11-25