ER流体応用ナノメートル位置決めテーブルシステムに関する研究

概要

論文の詳細を見る
With the increasing demands for higher machining accuracy and higher productivity, high speed ultraprecision table positioning technologies are urgently required. In order to meet these requirements, it is necessary and indispensable to realize the ultraprecision table system of non-contact type, which consists of an aerostatic guideway and a linear motor. However, such a table system of non contact type has low performances in the positioning stability and the disturbance response, because of friction free and low damping capacity in table guide system. In this paper, therefore, we applied the electrorheological fluid (ERF) unit to the already developed nanometer positioning table system driven by a brushless DC linear motor and guided by an aerostatic bearing. Furthermore, we clarified the effectiveness of ERF on the realization of good positioning performances of the ultraprecision table system.
一般社団法人日本機械学会の論文
1999-02-25