高速ナノメートル位置決めテーブルシステムの開発と基本特性評価

概要

論文の詳細を見る
With the demands for higher machining accuracy and higher productivity, high speed ultraprecision positioning technologies are increasingly required. Especially, requirements for the table system of semiconductor equipment, such as a step and scan exposure system and machine tool which can produce mirrors with 3-dimensional complex surface, are not only good positioning stability but also nanometer order tracking accuracy. Therefore, we developed a high speed nanometer positioning table system driven by a blushless DC linear motor and guided by an aerostatic bearing. The positioning controller of the developed table system consists of PID and feedforward compensator. The feedforward compensator aims to compensate for the force ripple of a linear motor and the vibration of a base plate. As a result, nanometer order positioning resolution, settling time of 0.34 s for a 60 mm point-to-point motion with a positioning error of less than 5 nm and tracking error (σ) of 20 nm at feed rate of 200 mm/s could be achieved.
一般社団法人日本機械学会の論文
1998-10-25