精密テーブルとその送り駆動系の連結機構に対する二,三の新提案

概要

論文の詳細を見る
In order to develop an ultraprecision machine tool or coordinate measuring machine, it is the most important to understand the characteristics of the connecting mechanism between the table and its driving system. The conventional connecting mechanisms so far used are considered to be inadequate to meet the current needs of ultraprecision machines. An advanced connecting mechanism should provide high rigidity only in the feed direction, i.e., direction-oriented rigidity, simultaneously having high flexibility in other directions to isolate unfavourable vibrations and disturbances. In contrast, such a connecting mechanism does not allow any heat transfer from the driving system. In this paper, therefore, to establish a precision feed table system, the two connecting mechanisms based on a new concept were proposed, and their performances were proved using a precision feed table system.
一般社団法人日本機械学会の論文
1991-10-25