Gas Phase Diagnosis of Disilane/Hydrogen RF Glow Discharge Plasma and Its Application to High Rate Growth of High Quality Amorphous Silicon

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-07-30

著者

• Kondo Masafumi

  Central Research Laboratories Charp Corporation

• Futako Wataru

  Tokyo Institute Of Technology

• Matsuda A

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Toyama University

• Kondo M

  Department Of Health And Welfare Nishikyushu University

• Takagi T

  Kyoto Univ. Kyoto Jpn

• Matsuda Akihisa

  Thin Film Silicon Solar Cells Superlabs. Electrotechnical Laboratory

• Matsuda Akihisa

  Thin Film Si Solar Cells Superlab. Electrotechnical Laboratory

• KONDO Michio

  Thin Film Silicon Solar Cells Super Laboratory, Electrotechnical Laboratory

• Takagi Tomoko

  Thin Film Silicon Solar Cells Super Laboratory, Electrotechnical Laboratory

• Nishimoto Tomonori

  Thin Film Silicon Solar Cells Super Laboratory, Electrotechnical Laboratory

• Shimizu Isamu

  Tokyo Institute of Technology

• Nishimoto Tomonori

  Thin Film Silicon Solar Cells Super Laboratory Electrotechnical Laboratory

• Kondo Michio

  Faculty Of Science And Engineering Saga University

• Kondo Michio

  Thin Film Si Solar Cells Superlab. Electrotechnical Laboratory

関連論文

• Characteristics of Superconducting Gd-Ba-Cu-O Thin Films
• Incorporation of Constituent Atoms of Transparent Conductive Films into Hydrogenated Amorphous Silicon via Gas Phase : Surfaces, Interfaces and Films
• The Orthorhombic-to-Tetragonal Phase Transition in Sputtered Gd-Ba-Cu-O Thin Films by Low Temperature Processing : Electrical Properties of Condensed Matter
• Thermal Stability of Hydrogen in Silicon Nitride Films Prepared by ECR Plasma CVD method : Surfaces, Interfaces and Films
• LPE Growth of InGa_xP_As_on GaAs Substrate by Two-Phase Melt Method.
• Coherent Anti-Stokes Raman Spectroscopy of Radio-Frequency Discharge Plasmas of Silane and Disilane
• Effect of α,α-Dialkyl Amino Acids on the Protease Resistance of Peptides(Organic Chemistry)
• The Position of Aib Residues Defines the Antimicrobial Activity of Aib-Containing Peptides
• Synthesis and Properties of Transmembrane Domains of Uncoupling Protein, UCP-2
• Side Chain Effect on Ion Channel Characters of Aib Rich Peptides
• Pore-Forming Properties and Ion Selectivity of Amphiphilic Helical Aib-containing Model Peptides
• Interaction of Alanine-based Peptides with Fluoresceins and Their Fluorescence Quenching Behavior
• Interaction and Orientation of an α-Aminoisobutyric Acid-and Tryptophan-Containing Short Helical Peptide Pore-Former in Phospholipid Vesicles, as Revealed by Fluorescence Spectroscopy^1
• Structural Change in Elastin Model Peptides upon Interaction with Biologically Important Metal Ions
• Reactive Ion Etching of Al Alloy Films in a Rotating Magnetic Field
• Structural Study on Amorphous-Microcrystalline Mixed-Phase Si:H Films
• Plasma Enhanced Chemical Vapour Deposition of Hydrogenated Amorphous Silicon from Dichlorosilane and Silane Gas Mixtures
• Annealing Energy Distribution of Light-Induced Defects of Hydrogenated Amorphous Silicon Films Grown from Silane and Dichlorosilane Gas Mixtures
• Comparison of Defect Annealing Kinetics of a-Si:H Prepared by Pure Silane and Helium Diluted Silane by Triode Plasma Chemical Vapour Deposition
• The Effect of Mesh Bias and Substrate Bias on the Properties of a-Si:H Deposited by Triode Plasma Chemical Vapour Deposition
• High Reliability in AlGaAs Laser Diodes Prepared by Molecular Beam Epitaxy on 0.5°-Misoriented (111)B Substrates : Waves, Optics and Quantum Electronics
• Enhancement of the Capture Rate of Carriers in (111)-Oriented GaAs/AlGaAs Quantum Well Structures : Electrical Properties of Condensed Matter
• Enhancement of Heavy-Hole-Related Excitonic Optical Transitions in (111)-Oriented Quantum Wells : Surfaces, Interfaces and Films
• Reduction in Threshold Current Density of Quantum Well Lasers Grown by Molecular Beam Epitaxy on 0.5° Misoriented (111)B Substrates
• Conformational Studies of Cyclo(Pro-Leu-Aib)_2 by ^1H Nuclear Magnetic Resonance Spectroscopy and Circular Dichroism^1
• Synthesis and Solution Conformations of Cyclo(Pro-Leu-Gly)_2 and Cyclo(Pro-Leu-Gly)_4
• Synthesis and Conformational Studies of Cyclic Peptides Containing the C-terminal Tripeptide Sequence of Oxytocin
• Elastin-derived Peptides : Structure, Functions and Mechanisms
• Molecular Mechanism for Pore-formation in Lipid Membranes by the Hemolytic Lectin CEL-III from Marine Invertebrate Cucumaria echinata
• Temperature Dependence of Piezoelectric Constant of 0.5PbNi_Nb_O_3-0.5Pb(Zr, Ti)O_3 Ceramics in the Vicinity of Morphotropie Phase Boundary
• Piezoelectric Properties of PbNi_Nb_O_3-PbTiO_3-PbZrO_3 Ceramics
• Interacions of Amphiphilic Aib-containing Helical Peptides with Phospholipid Membrane
• Synthesis and Secondary Structures of Aib Peptides Containing Tryptophan Residues
• Structure-Function Relationship of Model Aib-Containing Peptides as Ion Transfer Intermembrane Templates^1
• Ion Channel Formation and Sequence Dependence of Aib-containing Peptides
• Spatial Distribution of SiH_3 Radicals in RF Silane Plasma
• SiH_3 Radical Density in Pulsed Silane Plasma
• High-Power 780 nm AlGaAs Narrow-Stripe Window Structure Lasers with Window Grown on Facets
• Highly Reliable 150 mW CW Operation of Single-Stripe AlGaAs Lasers with Window Grown on Facets
• Stability of Two-Step-Growth Bi_2Sr_2CuO_x Films on Si(001) using SrO Buffer Layer(Superconductors)
• In-situ Annealing of Thin SrO Films Grown on Si(001)-2 × 1 by Molecular Beam Epitaxy
• Photoaffinity Labeling of Formylpeptide Receptors by fMLP Analogs
• Synthesis and Neutrophil Activation of fMLP Analogs Containing Conformationally Constrained Tic Residues
• Effects of Peptide Dimerization on Pore Formation : Antiparallel Disulfide-Dimerized Magainin 2 Analog
• Chemical Synthesis of Phosphorylated Peptides of The Carboxy-Terminal Domain of Human p53 by A Segment Condensation Method
• Device-Grade Amorphous Silicon Prepared by High-Pressure Plasma
• Effects of Hydrogen Diluted silane plasma on Amorphous Silicon Solar Cells
• Enhancement of Open Circuit Voltage via Light soaking in Amorphous Silicon Solar Cells
• Gas Phase Diagnosis of Disilane/Hydrogen RF Glow Discharge Plasma and Its Application to High Rate Growth of High Quality Amorphous Silicon
• Effects of Electrode Distance on Plasma Parameters and a-Si:H Film Properties in Plasma CVD Process
• Deviation Characteristics of Elliptical Laser Gaussian Beamson Optical Head
• Electroreflectance and Photoluminescence Studies of In_Ga_xP_As_y Lattice-Matched to GaAs
• A Study on LPE Growth of IN_Ga_xPAs_y(y≃0) on (100) GaAs Substrate
• COACERVATION AND CALCIUM ION BINDING PROPERTIES OF ELASTIN-DERIVED POLYPEPTIDE, (VAL-PRO-GLY-VAL-GLY)
• Coacervation Properties of Elastin-derived Polypeptides and Their Structural Analyses
• Elastin-derived polypeptides, (VPGVG)_n, (VPGV)_n and (VPG)_n : Coacervation Property and Specific Interaction with Metal Ions
• ACTIVATION OF HUMAN NEUTROPHILS BY fMLP ANALOGS CONTAINING 2,3-CYCLOPROPANE AMINO ACID
• Dimeric Chemotactic Peptides Discriminate between Chemotaxis and Superoxide Production of Human Neutrophils
• Solid-phase Synthesis and Chain-length Dependence of The Secondary Structure of α-Helical Model Peptides Containing Aib Residues
• High Rate Deposition of Microcrystalline Silicon Using Conventional Plasma-Enhanced Chemical Vapor Deposition
• Structure of Polycrystalline Silicon Thin Film Fabricated from Fluorinated Precursors by Layer-by-Layer Technique
• Preparation of High-Quality Microcrystalline Silicon from Fluorinated Precursors by a Layer-by-Layer Technique
• Role of Atomic Hydrogen During Growth of Hydrogenated Amorphous Silicon in the "Chemical Annealirng"
• A Significant Reduction of Impurity Contents in Hydrogenated Microcrystalline Silicon Films for Increased Grain Size and Reduced Defect Density
• Role of Hydrogen Plasma during Growth of Hydrogenated Microcrystalline Silicon : In Situ UV-Visible and Infrared Ellipsometry Study
• Coacervation and Self-Assembly of Polypeptide Derived from Elastin : Effects of Metal Cations
• Synthesis of 3-Substituted 2,3-Dehydroprolines: Oxidative Decarboxylation of Ethy Hydrogen Acetoamidomalonate Derivatives
• Roles of Atomic Hydrogen in Chemical Annealing
• Elastin Peptide Coacervate as a Model of Extracellular Elastomeric Matrix : Ionic Transport Study
• Biological Self-Assembly Model of Elastomeric Protein : Characteristics of Critical Processes in Coacervation of Elastin Peptides
• 分光エリプソメトリーによる半導体薄膜表面のその場観察
• Glow-Discharge Deposition of Amorphous Silicon from SiH_3F
• Influence of Power-Source Frequency on the Properties of GD a-Si:H
• Glow-Discharge Deposition of a-Si: H from Pure Si_2H_6 and Pure SiH_4
• Study of Photo-Magnetic Effects and ESR in Silicon Doped with Shallow Centers Using a SQUID Magnetometer
• Effects of Substrate Surface Morphology on Microcrystalline Silicon Solar Cells

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