Stability Control of Composition of RF-Sputtered Pb(Zr, Ti)O_3 Ferroelectric Thin Film
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-09-30
著者
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Nishioka Yasushiro
Texas Instruments Tsukuba R & D Center
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Nishioka Yasushiro
Tsukuba Research And Development Center Japan Texas Instruments
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SUU Koukou
Institute for Super Materials, ULVAC Japan, Ltd.
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OSAWA Akira
Institute for Super Materials, ULVAC Japan, Ltd.
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TANI Noriaki
Institute for Super Materials, ULVAC Japan, Ltd.
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NISHIOKA Yutaka
Institute for Super Materials, ULVAC JAPAN, Ltd.
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Suu K
Ulvac Inc. Shizuoka Jpn
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Suu Koukou
Institute For Semiconductor Technologies Ulvac Inc.
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Osawa Akira
Institute For Super Materials Ulvac Japan Ltd.
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Nishioka Y
Tsukuba Research And Development Center Japan Texas Instruments
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Nishioka Yutaka
Institute For Semiconductor Technologies Ulvac Inc.
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Tani Noriaki
Institute For Super Materials Ulvac Japan Ltd.
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Suu Koukou
Institute for Semiconductor and Electronics Technologies, ULVAC Inc., Susono, Shizuoka 410-1231, Japan
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