Electron Beam Doping by Superdiffusion in Unirradiated Regions (X<300 Å) of Semiconductors at Room Temperature
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-12-30
著者
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Wada Takao
Department Of Lnternal Medicine School Of Medicine Keio University
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Wada Takao
Department Of Electrical And Computer Engineering Nagoya Institute Of Technology
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FUJIMOTO Hiroshi
Department of Electronics, Faculty of Engineering, Tottori University
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Yamada Yoshiyasu
Research Laboratories Nippondenso Co. Ltd.
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Yamada Yoshiyasu
Research Laboratory Denso Co. Ltd.
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TOYOTA Daisuke
Department of Applied Electronics, Daido Institute of Technology
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MASUDA Haruho
National Industrial Research Institute of Nagoya
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MIZUSAWA Kenichi
Nisshin High Voltage Co., Ltd.
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Toyota Daisuke
Department Of Applied Electronics Daido Institute Of Technology
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Mizusawa Kenichi
Nisshin High Voltage Co. Ltd.
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Wada Takao
Department Of Applied Electronics Daido Institute Of Technology
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Fujimoto Hiroshi
Department Of Applied Electronics Daido Institute Of Technology
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Fujimoto Hiroshi
Department of Advanced Energy, Graduate School of Frontier Sciences, The University of Tokyo
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