Novel Technique of Infrared Reflection Absorption Spectroscopy for Si Surface Study
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-08-15
著者
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Yamada Yoshiyasu
Research Laboratories Nippondenso Co. Ltd.
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OHSHIMA Hisayoshi
Structure and function property, PHESTO, JRDC
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Ohshima Hisayoshi
Structure And Function Property" Presto Jrdc
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OHSHIMA Hisayoshi
Structure and function property, PHESTO, JRDC:(Present) Research Laboratories, Nippondenso Co., Ltd.
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YAMADA Yoshiyasu
Research Laboratories, Nippondenso Co., Ltd.
関連論文
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- Novel Technique of Infrared Reflection Absorption Spectroscopy for Si Surface Study
- Behavior of Adsorbed Fatoms on Si Surface after HF Treatment