Behavior of Adsorbed Fatoms on Si Surface after HF Treatment

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概要

• 論文の詳細を見る
• 静岡大学の論文

著者

• Yamada Yoshiyasu

  Research Laboratories Nippondenso Co. Ltd.

• Ohshima Hisayoshi

  "Structure and function property", PRESTO, JRDC

• Ohshima Hisayoshi

  Structure And Function Property" Presto Jrdc

関連論文

• Electron Beam Doping by Superdiffusion in Unirradiated Regions (X
• Novel Technique of Infrared Reflection Absorption Spectroscopy for Si Surface Study
• Behavior of Adsorbed Fatoms on Si Surface after HF Treatment

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