High-Speed Atomic Force Microscope by Surface Topography Observer
スポンサーリンク
概要
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This paper discusses novel high-speed imaging method for atomic force microscope (AFM) without modification of hardware. In conventional AFM, an image is obtained from control input of Z-scanner. On the other hand, we propose observer based imaging method which has based on observer theory in control technology. The proposed method achieves high-speed imaging without loss of stability margin of control system, and modification of hardware. In this paper, effectiveness of proposed method is shown by some simulation and experimental results.
- 2012-02-25
著者
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Fujimoto Hiroshi
Department Of Applied Electronics Daido Institute Of Technology
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Shiraishi Takayuki
Department of Electrical and Computer Engineering, Graduate School of Engineering, Yokohama National University, Yokohama 240-8501, Japan
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Fujimoto Hiroshi
Department of Advanced Energy, Graduate School of Frontier Sciences, The University of Tokyo
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Fujimoto Hiroshi
Department of Advanced Energy, Graduate School of Frontier Sciences, The University of Tokyo, Kashiwa, Chiba 277-8561, Japan
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