Low-Temperature Cleaning of HF-Passivated Si(111) Surface with VUV Light
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1989-07-20
著者
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Niwano Michio
Research Institute of Electrical Communication (RIEC), Tohoku University
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Kato Hiroo
Photon Factory, National Laboratory for High Energy Physics (KEK)
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Niwano M
Tohoku Univ. Sendai Jpn
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Kato H
Photon Factory High Energy Accelerator Research Organization
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Kato Hiroo
Institute Of Material Structure Science High Energy Accelerator Research Organization
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Kato H
Saitama University
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Kato Hiromichi
Department Of Materials Science And Engineering Nagoya Institute Of Technology
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TAKAKUWA Yuji
Research Institute for Scientific Measurements, Tohoku University
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Takakuwa Y
Tohoku Univ. Sendai Jpn
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Takakuwa Yuji
Research Institute For Scientific Measurements Tohoku University
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MIYAMOTO Nobuo
Research Institute of Electrical Communication, Tohoku University
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Kato Hisayuki
Semiconductor Design & Development Center Hitachi Ltd.
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NOGAWA Masafumi
Research Institute of Electrical Communication, Tohoku University
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KATAKURA Hitoshi
Research Institute of Electrical Communication, Tohoku University
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MATSUYOSHI Satoshi
Research Institute of Electrical Communication, Tohoku University
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ISHIDA Hiroyuki
Research Institute of Electrical Communication, Tohoku University
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Nogawa Masafumi
Ntt Network Service Systems Labotatories
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Nogawa Masafumi
Research Institute Of Electrical Communication Tohoku University:(present) Lsi Laboratory Ntt Ltd.
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Miyamoto N
Spring-8 Service Co. Ltd.
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Niwano Michio
Research Institute Of Electrical Communication (riec) Tohoku University
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Kato Hiroo
Photon Factory High Energy Accelerator Research Organization
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Kato H
Department Of Mechanical And Intelligent Engineering Graduate School Of Engineering Utsunomiya Unive
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Miyamoto Nobuo
Research Development Corporation Of Japan (jrdc)
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Ishida H
Sanyo Electric Co. Ltd. Gifu Jpn
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Ishida H
Keio Univ. School Of Medicine
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Matsuyoshi Satoshi
Research Institute Of Electrical Communication Tohoku University
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Katakura H
Research Institute Of Electrical Communication Tohoku University
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MIYAMOTO Naokazu
SPring-8 Service Co., Ltd.
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