Lattice Strain of Selectively Grown Silicon Epitaxial Layer
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1986-12-20
著者
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MIYAMOTO Nobuo
Research Institute of Electrical Communication, Tohoku University
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Kanai Akira
Takasaki Works Hitachi Lid.
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Miyamoto Nobuo
Research Development Corporation Of Japan (jrdc)
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KATO Hiroshi
Takasaki Works, Hitachi, Lid.
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Kato Hiroshi
Takasaki Works Hitachi Lid.:(present Address) Takasaki Technical Center Hitachi Microcomputer Engineering Lid.
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