Novel Analysis System of Imaging-Plate Plane-Wave X-Ray Topography for Characterizing Lattice Distortion in Silicon

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-06-15

著者

• Kitao Shinji

  Research Reactor Institute Kyoto University

• Ishikawa T

  Riken Harima Institute

• Kojima S

  Univ. Tsukuba Ibaraki Jpn

• ISHIKAWA Tetsuya

  Faculty of Engineering, The University of Tokyo

• Liu Kuang-yu

  Environment & Analysis Technology Department Technical Support Center Sony Corporation

• Kawado Seiji

  Environment & Analysis Technology Department Technical Support Center Sony Corporation

• Kawado Seiji

  Sony Corporation Research Center

• Kikuta Seishi

  Department Of Applied Physics Faculty Of Engineering The University Of Tokyo

• Kikuta Seishi

  Institute For Solid State Physics University Of Tokyo

• Kudo Y

  Environment & Analysis Technology Department Technical Support Center Sony Corporation

• Kawasaki S

  Lnstitute For Chemical Research Kyoto University

• Ishikawa T

  National Space Dev. Agency Of Japan Ibaraki Jpn

• Ishikawa T

  Kyushu Univ. Fukuoka Jpn

• KUDO Yoshihiro

  Sony Corporation Research Center

• KOJIMA Shigeru

  Sony Corporation Research Center

• LIU Kuang

  Sony Corporation Research Center

• Kudo Yuki

  Faculty Of Technology Tokyo Universily Of Agriculture And Technology

• Kudo Yoshihiro

  Environment & Analysis Technology Department Technical Support Center Sony Corporation

• Ishikawa Tetsuya

  Riken Harima Institute

• Ishikawa Tomonori

  Fujitsu Limited

• Ishikawa Takatoshi

  Department Of Applied Physics Faculty Of Science Fukuoka University

• Kaito Shinji

  Research Reactor Institute Kyoto University

• Kikuta S

  Univ. Tokyo Tokyo

関連論文

• Development of ^Eu Time-Domain Interferometry and Its Application for the Study of Slow Dynamics in Ionic Liquids
• Mossbauer Spectroscopy of La_Ca_FePO and LaFeAsO_F_ under External Magnetic Field and Nuclear Resonant Inelastic Scattering of La_Ca_FePO(Condensed matter: electronic structure and electrical, magnetic, and optical prop
• Spin Ordering in LaFeAsO and Its Suppression in Superconductor LaFeAsO_F_ Probed by Mossbauer Spectroscopy(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
• Dependence of Incoherent Nuclear Resonant Scattering of Synchrotron Radiation on the Number of Resonant Nuclei(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
• Generation and Application of Ultrahigh Monochromatic X-ray Using High-Quality ^FeBO_3 Single Crystal
• Nuclear Resonant Scattering of Synchrotron Radiation by Yb Nuclides(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
• Effects of Charge Disproportionation on the Phonon Density of States in Fe Perovskites(Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
• Enhancement of Incoherent Elastic Scattering with Magnetic Ordering in the Energy Spectra of Nuclear Resonant Scattering(Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
• Nuclear Resonant Quasielastic Scattering from Fe Cations in Nafion Membranes : Effect of Dynamics in a Short Time Range : Condensed Matter: Structure, etc.
• Determination of the Density and the Thickness of SiO_2 Films Using Extremely Asymmetric X-Ray Diffraction
• InAs/GaAs Multi-Coupled Quantum Dots Structure Enabling High-Intensity, Near-1.3-μm Emission due to Cascade Carrier Tunneling
• Study on the Si(111) √×√ - Ag Surface Structure by X-Ray Diffraction : Surfaces, Interfaces and Films
• Highly Uniform, High-Purity GaAs Epitaxial Layer Grown by MBE Using Triethylgallium and Arsenic : Semiconductors and Semiconductor Devices
• GaAs Surface Cleaning with HCl Gas and Hydrogen Mixture for Molecular-Beam-Epitaxial Growth : Semiconductors and Semiconductor Devices
• Effect of Thermal Etching on GaAs Substrate in Molecular Beam Epitaxy
• Interference of Nuclear Bragg Scattered X-Rays in X-Ray Interferometer with Large Optical Path Difference
• Time Domain Interferometry in X-Ray Region Using Nuclear Resonant Scattering
• Time-Delayed Interferometry with Nuclear Resonant Scattering of Synchrotron Radiation
• Flux Growth and Characterization of α-^Fe_2O_3 Single Crystals for Nuclear Bragg Scattering Optical Components
• X-Ray Standing Wave Analysis of GaAs/Si Interface
• Focusing Properties of a Linear-Phase Bragg-Fresnel Lens
• A Plane Wave Diffraction on an Amplitude-Phase Laue Microinterferometer
• X-Ray Standing Wave Analysis of Al/GaAs/Si(111)
• High-Resolution Measurements of Nuclear Bragg Scattering from a Synthetic α-^Fe_2O_3 Crystal
• An X-Ray Phase Plate Using Bragg-Case Diffraction
• High-Pressure Mossbauer and X-Ray Powder Diffraction Studies of SrFeO_3(Condensed Matter : Electric Structure, Electical, Magnetic and Optical Properties)
• Charge Disproportionation and Magnetic Order of CaFeO_3 under High Pressure up to 65 Gpa : Condensed Matter: Electronic Properties, etc.
• Development of neV-resolution spectroscopy using synchrotron-based 57Fe mossbauer radiation
• Nuclear Resonant Scattering of Synchrotron Radiation by ^Gd
• Phonon Density of States of Pseudomorphic fcc-Fe Film(Condensed Matter : Structure, Mechanical and Thermal Properties)
• Nuclear Resonant Scattering of Synchrotron Radiation by ^Sb and ^Sm : Cross-Disciplinary Physics
• Experimental Study of the Influence of Magnetic Phase Transition on the Mossbauer Time Spectra of the Nuclear Forward Scattering
• Phase Transitions in Fe^ (3d^4)-Perovskite Oxides Dominated by Oxygen-Hole Character
• Mossbauer Time Spectra of the Nuclear Forward Scattering from Coherently Vibrating Resonant Nuclei
• First Application of X-ray Refraction-based Computed Tomography to a Biomedical Object(Physiology)
• Measurement of Local Lattice Distortion in Silicon by Imaging-Plate Plane-Wave X-Ray Topography with Image Magnification
• Time-Resolved X-Ray Diffraction Measurement of Silicon Surface during Laser Irradiation under Grazing-Incidence Conditions
• Novel Analysis System of Imaging-Plate Plane-Wave X-Ray Topography for Characterizing Lattice Distortion in Silicon
• Switching of Photon Helicities in the Hard X-Ray Region with a Perfect Crystal Phase Retarder
• Time-Resolved X-Ray Diffraction from a Silicon Crystal Irradiated by a Q-Switched Nd:YAG Laser : Condensed Matter
• X-Ray Standing Wave Method Applied to the Characterization of InGaAsP Alloy Semiconductor Thin Film
• Observation of X-Ray Diffraction Spots from the (√×√)R30°Bi Structure on the Si(111) Surface under the Condition of Large Incidence Angle
• Structure Analysis of the NiSi_2/(111)Si Interface by the X-Ray Standing Wave Method
• Temporal Mossbauer Absorber Thickness Effect Demonstrated Using Synchrotron Radiation
• Mossbauer Study of FeCl_3-Doped Polythiophene and Poly(3-Octylthiophene)
• Effect of H_2 on the Quality of Si-Doped Al_xGa_As Grown by MBE
• The Effect of Annealing on the Electrical Properties of Selectively Doped GaAs/N-AlGaAs Heterojunction Structures Grown by MBE
• Electronic States in Selectively Si-Doped N-AlGaAs/GaAs/N-AlGaAs Single Quantum Well Structures Grown by MBE
• Improved 2DEG Mobility in Inverted GaAs/n-AlGaAs Heterostructures Grown by MBE
• Implantation into an AlGaAs/GaAs Heterostructure : B-6: III-V DEVICE TECHNOLOGY
• Dependence of the Mobility and the Concentration of Two-Dimensional Electron Gas in Selectively Doped GaAs/N-Al_xGa_As Heterostructure on the AlAs Mole Fraction
• Electrical Properties of Si-Doped Al_xGa_As Layers Grown by MBE
• Study of 4p Electronic States Related to Magnetic Phase Transition in Mn_3MC (M=Zn and Ga) by X-ray Magnetic Circular Dichroism(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
• Influence of MBE Growth Conditions on Persistent Photoconductivily Effects in N-AlGaAs and Selectively Doped GaAs/AlGaAs Heterostructures
• Mossbauer Study of Iodine-Doped Fluoro-Aluminum Phthalocyanine
• Dynamics of Fe Cations in Nafion Membranes Studied by Nuclear Resonant Quasielastic Scattering of Synchrotron Radiation : Condensed Matter: Electronic Properties, etc.
• Nuclear Excitation of ^Fe Ions in Hydrochloric Acid Solution Using Synchrotron Radiation
• Near-1.3-μm High-Intensity Photoluminescence at Room Temperature by InAs/GaAs Multi-Coupled Quantum Dots
• Fast Recovery from Excitonic Absorption Bleaching in Type-II : GaAs/AlGaAs/AlAs Tunneling Biquantum Well
• Quantum Well Width Dependence of Negative Differential Resistance of In_Al_As/In_Ga_As Resonant Tunneling Barriers Grown by MBE
• Conduction Band Edge Discontinuity of In_Ga_As/In_(Ga_1 _xAl_x)_As(0≦x≦1) Heterostructures
• Transmission-Type X-Ray Phase Retarder Using Ge Crystal in Laue Diffraction Geometry
• Synchrotron Plane Wave X-Ray Topography of 6 inch Diameter Si Crystal
• Generation Rule of the Slip Dislocation in LEC GaAs Crystal
• The Effect of Reduction of Dislocation Density on the Lattice Distortions in Undoped GaAs Single Crystal Grown by LEC Method
• Synchrotron Plane Wave X-Ray Topography of GaAs with a Separate (+, +) Monochro-Collimator
• X-Ray Topography Examination of Lattice Distortions in LEC-Grown GaAs Single Crystals
• Structural Analysis of the NiSi_2/(111)Si Interface by the X-Ray Standing-Wave Method
• Selectively Doped GaAs/ N-Al_Ga_As Heterostructures Grown by Gas-Source MBE : Semiconductors and Semiconductor Devices
• Nuclear Resonant Excitation of ^Dy and ^Eu by Synchrotron Radiation
• Characterization of Sb Atomic-Layer-Doped Si(100) Crystal by X-Ray Standing Wave Method
• Effects of GaAs-Surface Roughness on the Electron-Beam Patterning Characteristics of a Surface-Oxide Layer
• In Situ Fabrication of Buried GaAs/AlGaAs Quantum-Well Mesa-Stripe Structures with Improved Regrown Interfaces
• In situ Electron-beam Processing for GaAs/AlGaAs Nano-structures
• Improvement in Patterning Characteristics of GaAs Oxide Mask Used in In Situ Electron-Beam Lithography
• In Situ GaAs Patterning and Subsequent Molecular-Beam Epitaxial Regrowth of AlGaAs/GaAs Wire Structures
• Electron Beam Patterning Mechanism of GaAs Oxide Mask Layers Used in In Situ Electron Beam Lithography
• Cathodoluminescence of Wirelike GaAs/AlAs Quantum Well Structures Grown on Substrates Patterned with [001] Mesa Stripes
• Characterization of In Situ Cl_2-Etched GaAs Buffer Layers and Regrown GaAs/AlGaAs Quantum Welts
• Helicity-Modulation Technique Using Diffractive Phase Retarder for Measurements of X-ray Magnetic Circular Dichroism
• Laue-Case Plane Wave Topography Using Synchrotron Radiation to Reveal Microdefects in a Thinned Silicon Crystal
• Observation of Microdefects in Thin Silicon Crystals by Means of Plane-Wave Topography Using Synchrotron X-Radiation
• Improved Theory for Carrier Leakage and Diffusion in Multiquantum-well Semiconductor Lasers
• Strained Layer Multiquantum Barriers with Improved Carrier Injection and Confinement
• A Pseudomorphic In_Ga_As/AlAs Resonant Tunneling Barrier with a Peak-to-Valley Current Ratio of 14 at Room Temperature
• A New Heterostructure for 2DEG System with a Si Atomic-Planar-Doped AlAs-GaAs-AlAs Quantum Well Structure Grown by MBE
• Sub-100 nm Patterning of GaAs Using In Situ Electrom Beam Lithography
• Photoluminescence Study of Electron-Beam-Induced Damage in GaAs/AlGaAs Quantum-Well Structures
• Role of an Electron Beam in the Modification of a GaAs Oxide Mask for in situ EB Lithography
• Excellent Negative Differential Resistance of InAlAs/InGaAs Resonant Tunneling Barrier Structures Grown by MBE
• Effect of Silicon Doping Profile on I-V Characteristics of an AlGaAs/GaAs Resonant Tunneling Barrier Structure Grown by MBE
• Time Evolution of Excitonic Absorption Bleaching of Resonant Tunneling Bi-Quantum-Well Structures
• Negative Differential Resistance of Strain-Free InGaAs/AlAsSb Resonant Tunneling Barrier Structures Lattice-Matched to InP
• Development of neV-Resolution Spectroscopy Using Synchrotron-Based 57Fe Mössbauer Radiation
• Mossbauer Study of the SmFe Hydride through 149Sm and 57Fe
• Small and Large Angle Quasi-Elastic Scattering Experiments by Using Nuclear Resonant Scattering on Typical and Amphiphilic Liquid Crystals
• Improvement of Efficiency of Time-Domain Interferometry Method Using Two Driven Nuclear Absorbers
• Small and Large Angle Quasi-Elastic Scattering Experiments by Using Nuclear Resonant Scattering on Typical and Amphiphilic Liquid Crystals
• Improvement of Efficiency of Time-Domain Interferometry Method Using Two Driven Nuclear Absorbers
• Conversion Electron and X-ray Mössbauer Spectroscopies Using Synchrotron Radiation

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