Applications of Pulsed Excimer Laser Deposition with a Frozen Nitrogen Target to Deposition of NbN and BN Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-04-15
著者
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HIROSHIMA Yasushi
Technology Platform Research Center, Seiko Epson Cooperation
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Ishiguro T
Kyoto Univ. Kyoto
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Ishiguro T
Department Of Physics Graduate School Of Science Kyoto University:crest Japan Science And Technology
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ISHIGURO Takashi
Department of Electrical Engineering, Nagaoka University of Technology
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HIROSHIMA Yasushi
Applied Laser Engineering Research Institute
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ESAKI Kotaro
Department of Electrical Engineering, Nagaoka University of Technology
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Ishiguro T
Nagaoka Univ. Technol. Nagaoka Jpn
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Esaki Kotaro
Department Of Electrical Engineering Nagaoka University Of Technology
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ISHIGAURO Takehiko
Electrotechnical Laboratory
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Hiroshima Y
Technology Platform Research Center Seiko Epson Cooperation
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Ishiguro Takashi
Department Of 2nd Physiology Showa University School Of Medicine
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