Controllability of Mesoscopic Surface Roughness of Sputtered Al and Al-N Films
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2005-12-20
著者
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Ishiguro T
Kyoto Univ. Kyoto
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Ishiguro T
Department Of Physics Graduate School Of Science Kyoto University:crest Japan Science And Technology
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ISHIGURO Takashi
Department of Electrical Engineering, Nagaoka University of Technology
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MIYAMURA Kazumi
Department of Electrical Engineering, Nagaoka University of Technology
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Ishiguro T
Nagaoka Univ. Technol. Nagaoka Jpn
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ISHIGAURO Takehiko
Electrotechnical Laboratory
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Miyamura Kazumi
Department Of Electrical Engineering Nagaoka University Of Technology
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Ishiguro Takashi
Department Of 2nd Physiology Showa University School Of Medicine
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