(CoFeB)-(SiO_2)系高電気抵抗膜の高周波透磁率特性

概要

論文の詳細を見る
Soft magnetic (CoFeB)-(SiO_2) films with highly electrical resistivity were deposited on glass substrates and hard-cured polyimide substrates by synchronous dualrf magnetron sputtering. Frequency dependence of the permeability of the films was investigated. The films on both substrates exhibited highly resistive soft magnetic properties and a flat frequency profile with constant μ_r' over 800 MHz and a high resonance frequency of 1. 5 to 1. 8 GHz. The reciprocal of the loss factor tan δ (μ_r'/μ_r'') at 400 MHz was about 30 for the film on a glass substrate. Films deposited on hard-cured polyimide were applied to al-GHz drive frequency inductor. Inductance of the inductor increased by about 20% compared with that of the inductor without these films. If was concluded that the (CoFeB)-(SiO_2) films exhibited superior low loss characteristics in the range of 10 MHz to 1 GHz.
社団法人日本磁気学会の論文
2000-04-15