二方向マイクロパターン化磁性膜を用いたRF集積化インダクタ

概要

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Thin-film inductors with micro-patterned CoNbZr films for use as the impedance-matching elements in 1-GHz-drive mobile communication handsets were demonstrated. Intrinsic easy axis orientation at an angle of 45 degrees and micro-patterning enable the entire area of the magnetic film on the spiral to be used, because hard-axis excitation is possible in any part of the film. When a bidirectional film with a line and space of 10μm/1μm, the rf inductor exhibited an inductance of L=8.2nH. This increase in inductance is twice as large than that in the same type of inductor using a uniaxial magnetic film.
社団法人日本磁気学会の論文
2001-04-15