半導体液相成長モルフォロジーの実験的理論的研究(<特集>結晶のモルフォロジー)

概要

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Two typical LPE morphologies have been theoretically and experimentally studied. The one is called wave or terrace which appears on the substrate with a small misorientation from (111) or (100) low index singular plane. The other has a spike shape and is found on the edge of the substrate. Both morphologies are studied by solving 2-dimensional diffusion equation. The former is explained by morphological stability theory in which solid-liquid interface shape has been connected with the 2-dimensional diffusion field. The theory predicts the functional dependency of the wavelength on supersaturation as well as roughly its absolute value. The latter morphology which has been called edge growth is explained to be formed by the diffusion of the solute from the outside of the solution on the nongrowth region adjacent to the growth edge. Several methods to minimize the edge growth have been proposed.
日本結晶成長学会の論文
1979-12-25