3223 空気静圧軸受けを用いた高精度リニア・トラッキング

概要

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The areal density of hard disk drives (HDD) is expected to reach 1 Tbits/in^2 with very narrow track width heads below 50nm in the near future. Assuming that the allowable tracking error is 10% of the track width, the tracking accuracy should be less than 5nm. Moreover, when we will investigate track profiles and off-track characteristics using a read-write performance tester, the tracking actuator should have capability of positioning at sub-nanometer resolution. Therefore, an actuator consisting of a linear air bearing and a linear VCM(Voice Coil Motor) was designed for precise tracking. The stiffness of the air bearing was strong enough so that the moving coil of a VCM fixed to the air bearing slider arm could form a cantilever system. The linear actuator showed a much higher resonance frequency than a conventional rotary actuator. Due to the high resonance frequency the servo bandwidth became significantly wider. The linear actuator could be stepped at 1nm resolution without overshoots and undershoots and the rise time was less than 0.15msec.
一般社団法人日本機械学会の論文
2002-09-20