3822 平面位置決めを実現するナノモーションステージ(S56 磁気ヘッド浮上・位置決め制御技術,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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A highly precise tracking actuator for a magnetic recording evaluation system was developed. The tracking actuator called the Nano-Motion Actuator (NMA) that was consisted of a displacement amplitude mechanism and a layered piezoelectric element (PZT). In this paper, we propose a new X-Y plane positioning actuator called Nano-Motion Stage (NMS) that was composed of one pair of NMA, positioning stage, parallel link, directional spring and so on. And, the control performance and the plane positioning accuracy were verified. As a result of the experiment, the gain crossover frequency of 2.0kHz could be reached, high-speed and highly precise positioning in same X-Y plane could be realized.
社団法人日本機械学会の論文
2008-08-02