弾性支持ばね機構の変位量に基づく力フィードバック制御に関する研究

概要

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Nanotechnology is based on a combination of many technologies such as high precise positioning and force control, especially magnetic recording, biotechnology and semiconductor industry require the utilization of nanotechnology. Until now there have been various actuator systems proposed, but the structure models have only working distances of either under a millimeter or over ten millimeters. Structure models with working distance ranging several millimeters has been designed a little. Therefore we are proposing a new structure design of actuator that would allow us to build actuator systems with working distances between those parameters. This new actuator consists of a voice coil motor and a new guide with an elastic support mechanism. The elastic support mechanism (ESM) consists of a special spring which is restricted to moving in only one direction. This new ESM does not cause any lost motion, mechanical play or friction with motion. Since characteristically voice coil motor thrusts and displaces the elastic support mechanism linearly, highly precise positioning and force control can be realized using a simple controller. We will evaluate the force control method from the displacement of ESM. This paper will provide basic data for developing future Nano-Actuator systems.
社団法人日本機械学会の論文
2008-08-25