機台振動の抑制を図ったリニアモータ駆動テーブルの高速位置決め制御

概要

論文の詳細を見る
Driving table of a mechatronics device equipped with a linear motor driving mechanism is affected by thrust at high acceleration and deceleration. The reactive force of the thrust exerted on the stator and the base supporting the stator causes vibration. This vibration has an influence on the prolonged positioning time of the control system. To solve this problem, this paper describes about a control algorithm that suppresses base vibration and achieves high-speed positioning. The proposed control method consists of the response filter and the base vibration suppression controller based on the base vibration model, and constructs 2-degree-of-freedom controller. A remarkable improvement in performance can be observed in the experimental results.
社団法人精密工学会の論文
2004-05-05