Direct Etching of Poly(methyl methacrylate) Using Laser Plasma Soft X-rays

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概要

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• We have investigated direct etching of poly(methyl methacrylate) (PMMA) using laser plasma soft X-rays. We focused soft X-rays of 6--25 nm on PMMA sheets efficiently using an Au coated ellipsoidal mirror. $7\times 10^{-2}$% of laser energy is estimated to be converted to soft X-rays that was incident to the PMMA sheets. We found that PMMA surfaces are etched beyond a threshold power density. The energy density of absorbed soft X-rays at the threshold is 7 kJ/cm3. The results suggest that etching is governed by decomposition into fragments.

• Japan Society of Applied Physicsの論文
• 2010-06-25

著者

• TAKAHASHI Akihiko

  Department of Cardiology, Sakurakai Takahashi Hospital

• OKADA Tatsuo

  Graduate School of Information Science and Electrical Engineering, Kyushu University

• NIINO Hiroyuki

  Photoreaction Control Research Center, National Institute of Advanced Industrial Science and Technol

• Niino Hiroyuki

  Photonic Research Institute National Institute Of Advanced Industrial Science And Technology

• MURAKAMI Kouichi

  Institute of Materials Science, University of Tsukuba, Tsukuba Academic City

• Torii Shuichi

  Institute Of Applied Physics University Of Tsukuba

• MAKIMURA Tetsuya

  Institute of Applied Physics, University of Tsukuba

• NAKAMURA Daisuke

  Graduate School of Information Sciences and Electrical Engineering, Kyushu University

• Murakami Kouichi

  Institute Of Applied Physics University Of Tsukuba

• Okada Tatsuo

  Graduate School Of Information Science And Electrical Engineering Kyushu University

• Okada Tatsuo

  Graduate School Of Information Sciences And Electrical Engineering Kyushu University

• Okazaki Kota

  Department Of Health Sciences School Of Medicine Kyushu University

• Nakamura Daisuke

  Graduate School Of Information Sciences And Electrical Engineering Kyushu University

• Murakami K

  Institute Of Applied Physics University Of Tsukuba

• Okazaki Kouta

  Graduate School of Information Sciences and Electrical Engineering, Kyushu University, 744 Motooka,

• Makimura Tetsuya

  Institute Of Applied Physics University Of Tsukuba

• Makimura Tetsuya

  Institute Of Applied Physics University Of Tsukuba Tsukuba

• Takahashi Akihiko

  Department Of Health Sciences School Of Medicine Kyushu University

• Takahashi Akihiko

  Department Of Cardiology Sakurakai Takahashi Hospital

• Nakamura Daisuke

  Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan

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