Micromachining of Silica Glass Using EUV Radiation of Laser-Produced Plasma (特集 量子ビームによるナノバイオエレクトロニクス)

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概要

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• We are investigating the micromachining of silica glass using extreme ultraviolet (EUV) light from laser-produced plasma (LPP). The present investigation deals with the ablation using EUV light of around 13.5 nm and 11 nm generated in laser-produced Sn plasma and Xe plasma, respectively. CO2 laser and Nd:YAG lasers were used as pump lasers. The EUV radiation was focused on the surface of silica glass through the meshed mask using an ellipsoidal mirror coated with gold film. The results showed that the silica glass was successfully ablated by EUV light from the Nd:YAG-LPP. The maximum ablation rate was 42 nm per shot for 11-nm light, and 25 nm per shot for 13.5-nm light. On the other hand, EUV radiation from the CO2-LPP did not ablate the silica glass. This is presumably caused by the lower EUV irradiation intensity due to the long pulse duration of the CO2 laser.

• 社団法人 電気学会の論文

著者

• TAKAHASHI Akihiko

  Department of Cardiology, Sakurakai Takahashi Hospital

• OKADA Tatsuo

  Graduate School of Information Science and Electrical Engineering, Kyushu University

• NIINO Hiroyuki

  Photoreaction Control Research Center, National Institute of Advanced Industrial Science and Technol

• Niino Hiroyuki

  Photonic Research Institute National Institute Of Advanced Industrial Science And Technology

• MURAKAMI Kouichi

  Institute of Materials Science, University of Tsukuba, Tsukuba Academic City

• Torii Shuichi

  Institute Of Applied Physics University Of Tsukuba

• MAKIMURA Tetsuya

  Institute of Applied Physics, University of Tsukuba

• OKAZAKI Kota

  Department of Health Sciences, School of Medicine, Kyushu University

• NAKAMURA Daisuke

  Graduate School of Information Sciences and Electrical Engineering, Kyushu University

• Murakami Kouichi

  Institute Of Applied Physics University Of Tsukuba

• Okada Tatsuo

  Graduate School Of Information Science And Electrical Engineering Kyushu University

• Okazaki Kota

  Department Of Health Sciences School Of Medicine Kyushu University

• Nakamura Daisuke

  Graduate School Of Information Sciences And Electrical Engineering Kyushu University

• Makimura Tetsuya

  Institute Of Applied Physics University Of Tsukuba

• Makimura Tetsuya

  Institute Of Applied Physics University Of Tsukuba Tsukuba

• Takahashi Akihiko

  Department Of Health Sciences School Of Medicine Kyushu University

• Takahashi Akihiko

  Department Of Cardiology Sakurakai Takahashi Hospital

• OKADA Tatsuo

  Graduate School of Information Sciences and Electrical Engineering, Kyushu University

• NIINO Hiroyuki

  Photonic Research Institute, National Institute of Advanced Industrial Science and Technology

• MURAKAMI Kouichi

  Institute of Applied Physics, University of Tsukuba

• Torii Shuichi

  Institute of Applied Physics, University of Tsukuba

• Nakamura Daisuke

  Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan

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