Micromachining of Silica Glass Using EUV Radiation of Laser-Produced Plasma

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概要

• 論文の詳細を見る
• 2010-10-01

著者

• TAKAHASHI Akihiko

  Department of Cardiology, Sakurakai Takahashi Hospital

• OKADA Tatsuo

  Graduate School of Information Science and Electrical Engineering, Kyushu University

• NIINO Hiroyuki

  Photoreaction Control Research Center, National Institute of Advanced Industrial Science and Technol

• Niino Hiroyuki

  Photonic Research Institute National Institute Of Advanced Industrial Science And Technology

• MURAKAMI Kouichi

  Institute of Materials Science, University of Tsukuba, Tsukuba Academic City

• Torii Shuichi

  Institute Of Applied Physics University Of Tsukuba

• MAKIMURA Tetsuya

  Institute of Applied Physics, University of Tsukuba

• OKAZAKI Kota

  Department of Health Sciences, School of Medicine, Kyushu University

• NAKAMURA Daisuke

  Graduate School of Information Sciences and Electrical Engineering, Kyushu University

• Murakami Kouichi

  Institute Of Applied Physics University Of Tsukuba

• Okada Tatsuo

  Graduate School Of Information Science And Electrical Engineering Kyushu University

• Okazaki Kota

  Department Of Health Sciences School Of Medicine Kyushu University

• Nakamura Daisuke

  Graduate School Of Information Sciences And Electrical Engineering Kyushu University

• Makimura Tetsuya

  Institute Of Applied Physics University Of Tsukuba

• Makimura Tetsuya

  Institute Of Applied Physics University Of Tsukuba Tsukuba

• Takahashi Akihiko

  Department Of Health Sciences School Of Medicine Kyushu University

• Takahashi Akihiko

  Department Of Cardiology Sakurakai Takahashi Hospital

• Nakamura Daisuke

  Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka 819-0395, Japan

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