化学気相合成ダイヤモンド(100)の表面酸化過程の走査トンネル顕微鏡, 光電子放出顕微鏡及びX線光電子分光による評価

概要

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We have investigated atomic structures of B-doped microwave-plasma chemical-vapor-deposited (CVD) diamond (100) surfaces using an ultra-high-vacuum scanning tunneling microscope (STM), photoelectron emission microscopy (PEEM) and X-ray photoelectron spectroscopy (XPS). STM images taken from the diamond surfaces at the various oxidization stages reflected corresponding surface structures, from which the oxygen sites and oxidization process of the as-grown CVD diamond were discussed. PEEM images demonstrated a rather high electron emissivity of the as-grown CVD diamond surface and decreasing emissivities after light oxidization. XPS spectra taken from these surfaces demonstrated corresponding changes in shape with oxidization.
日本真空協会の論文
2005-03-20