Electron Heating and Control of RF-Produced Plasma Parameters Excited by a Planar, Spiral Antenna
スポンサーリンク
概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-01
著者
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KAWAI Yoshinobu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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SHINOHARA Shunjiro
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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Shinohara Shunjiro
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Kawai Y
Welding Research Institute Osaka University
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Takechi Seiji
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
関連論文
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- Electron Heating and Control of RF-Produced Plasma Parameters Excited by a Planar, Spiral Antenna