Production of Low-Electron-Temperature Electron Cyclotron Resonance Plasma Using Nitrogen Gas in the Mirror Magnetic Field
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-01
著者
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KAWAI Yoshinobu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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Itagaki Naho
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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ISHII Nobuo
Tokyo Electron Ltd.
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Ueda Yoko
Interdiciplinary Gradate School of Engineering Sciences, Kyushu University
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