Parameters Measurement of ECR Silane Plasma
スポンサーリンク
概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-01
著者
-
KAWAI Yoshinobu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
-
Kawai Yoshinobu
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
-
Ueda Yoko
Interdiciplinary Gradate School of Engineering Sciences, Kyushu University
-
MORIMOTO Michikazu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
-
HIEJIMA Shinya
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
-
KATSUMATA Itsuo
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
関連論文
- Measurement of Edge Density Profiles and Fluctuations in the H-Mode Discharge of the Compact Helical System (CHS) with a Thermal Neutral Lithium Beam Probe
- Reconstruction of Edge-Plasma Density Profiles by Neutral Beam Probe Spectroscopy
- Behavior of Time-Resolved Ion Energy Distribution Functions during Ion-Ion Instability
- Suppression of Ion-Ion Instabilities Excited by an Obliquely Injected Ion Beam
- Production of a Large-Diameter Uniform ECR Plasma with a Lisitano Coil : Nuclear Science, Plasmas and Electric Discharges
- Impurity Ions in a Plasma Produced by Electron Cyclotron Resonance Heating : Nuclear Science, Plasmas and Electric Discharges
- Flute Stabilization of a Mirror-Confined Plasma by a Positive Ambipolar Potential
- Effect of Electromagnetic Waves Propagating in the Periphery of Electron Cyclotron Resonance Plasma on the Uniformity
- Three-Dimensional Simulation of Microwave Propagation in an Electron Cyclotron Resonance Plasma
- One-Dimensional Simulation of Microwave Propagation in Electron Cyclotron Resonance Plasmas
- Characteristics of Very High Frequency Plasma Produced with Ladder-Shaped Electrode at High Pressure
- Characteristics of Very-High-Frequency-Excited SiH_4 Plasmas using a Ladder-Shaped Electrode
- Characteristics of Very High Frequency Plasma Produced Using a Ladder-Shaped Electrode
- Production of Inductively Coupled RF Plasma Using a Ladder-Shaped Antenne
- Dynamic Formation of Excited Helicon Wave Structure and Estimation of Wave Energy Flux Distribution
- Dynamic Behavior of Helicon Wave Produced Plasma
- Suppression of Ion-Ion Instabilities by an External Field
- Observations of Subharmonic Waves in an Electron Beam Plasma System
- Electron Heating and Control of RF-Produced Plasma Parameters Excited by a Planar, Spiral Antenna
- Effects of Axial Magnetic Field and Faraday Shield on Characteristics of RF Produced Plasma Using Spiral Antenna
- Waveform of Linear Ion-Acoustic Waves Excited by a Mesh Grid
- Reflection of Ion Waves from a Bipolar Electrode in an Ion Beam-Plasma System
- Chaotic Behavior of Current-Carrying Plasmas in External Periodic Oscillations
- ECR Plasma CVD Using a Slotted Lisitano Coil
- Comments on the Reflection/Excitation Properties of a Bipolar Potential Structure Used in Ion Wave Experiments : Nuclear Sciences, Plasmas, and Electric Discharges
- Measurement of Ion Species Utilizing Ion-Bursts in an Ar/SF_6 Mixture Plasma
- Estimation of Electric Fields from Magnetic Field Distributions and an Application to Helicon Wave
- Skin Depth of Electromagnetic Waves in Plasma with Magnetic Field and Collisions
- Propagation Characteristics of Ion Acoustic Waves in an Ar/SF_6 Plasma
- Production Mechanism of a Large-Diameter Uniform Electron Cyclotron Resonance Plasma Generated by a Circular TE_ Mode Microwave
- 8" Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE_ Mode Microwave
- Excitation Characteristics of Ion Waves in a Negative Ion Plasma
- Parameters Measurement of ECR Silane Plasma
- Production of Low-Electron-Temperature Electron Cyclotron Resonance Plasma Using Nitrogen Gas in the Mirror Magnetic Field
- Observation of Synchronization of Two Chaotic Oscillators in Plasma
- Production of Low-Electron-Temperature Electron Cyclotron Resonance Plasma Using Nitrogen Gas in the Mirror Magnetic Field
- Parameters Measurement of ECR Silane Plasma
- Three-Dimensional Simulation of Microwave Propagation in an Electron Cyclotron Resonance Plasma