Parameters Measurement of ECR Silane Plasma

概要

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An electron cyclotron resonance (ECR) plasma with large diameter was produced using a multi-slot antenna (MSA). The plasma parameters in silane gas were measured as functions of microwave power and gas flow rate with a heated Langmuir probe and a microwave interferometer. The dependences of the plasma parameters on the gas flow rate were studied in detail. As the gas flow rate was increased, the electron temperature decreased and the electron density decreased while the positive ion density initially decreased and finally tended to increase at above 30 sccm. It was also found that the negative ion density is high, and increases with increasing gas flow rate. The ion temperature in He and H2 was measured with an ion sensitive probe (ISP). The features of the I-V curve of the ISP indicate that many negative ions are produced in H2 plasma and that the negative ion density increases with increasing microwave power.
Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
1997-07-30