Ueda Yoko | Interdiciplinary Gradate School of Engineering Sciences, Kyushu University
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概要
関連著者
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Ueda Yoko
Interdiciplinary Gradate School of Engineering Sciences, Kyushu University
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Kawai Yoshinobu
Interdiciplinary Gradate School Of Engineering Sciences Kyushu University
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KAWAI Yoshinobu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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Muta Hiroshi
Department Of Electronics And Control Engineering Kitakyushu National College Of Technology
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Kawai Yoshinobu
Welding Research Institute Osaka University
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Kawai Yasunobu
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Kawai Y
Welding Research Institute Osaka University
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Kawai Y
Kyushu Univ. Fukuoka Jpn
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Muta Hiroshi
Department of Electronics and Control Engineering, Kitakyushu National College of Technology
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Kawai Y
Mitsubishi Materials Silicon Corporation
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河合 良信
Kyushu Univ. Fukuoka
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Ueda Y
Asahi Chemical Industry Co. Ltd.
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Ueda Y
Graduate School Of Engineering Osaka University
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Muta H
Department Of Electronics And Control Engineering Kitakyushu National College Of Technology
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Itagaki Naho
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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河合 良信
九大総理工
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石井 信雄
東京エレクトロン
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Kawai Yoshinobu
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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ISHII Nobuo
Tokyo Electron Ltd.
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SAKODA Tadanori
Department of Electronics and Control Engineering, Kitakyushu National College of Technology
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MORIMOTO Michikazu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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HIEJIMA Shinya
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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KATSUMATA Itsuo
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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Sakoda Tadanori
Department Of Electronics And Control Engineering Kitakyushu National College Of Technology
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Hiejima Shinya
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Ishii Nobuo
Tokyo Electron Co. Ltd.
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Katsumata Itsuo
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816, Japan
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Ueda Yoko
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga-koen 6-1, Kasuga, Fukuoka 816-8580, Japan
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Ueda Yoko
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University,
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Ueda Yoko
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816, Japan
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Itagaki Naho
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga-koen 6-1, Kasuga, Fukuoka 816-8580, Japan
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Ishii Nobuo
Tokyo Electron Co., Ltd., Yodogawa, Osaka 532-0003, Japan
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Ishii Nobuo
Corporate R&D Central Research Laboratory, Tokyo Electron Ltd. 650 Mitsuzawa, Hosaka-cho, Nirasaki, Yamanashi 407-0192, Japan
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Ishii Nobuo
Corporate R&D Central Research Laboratory, Tokyo Electron Limited, Hosaka-cho, Nirasaki 407-01, Japan
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Morimoto Michikazu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816, Japan
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Kawai Yoshinobu
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga-koen 6-1, Kasuga, Fukuoka 816-8580, Japan
著作論文
- Effect of Electromagnetic Waves Propagating in the Periphery of Electron Cyclotron Resonance Plasma on the Uniformity
- Three-Dimensional Simulation of Microwave Propagation in an Electron Cyclotron Resonance Plasma
- One-Dimensional Simulation of Microwave Propagation in Electron Cyclotron Resonance Plasmas
- Parameters Measurement of ECR Silane Plasma
- Production of Low-Electron-Temperature Electron Cyclotron Resonance Plasma Using Nitrogen Gas in the Mirror Magnetic Field
- Production of Low-Electron-Temperature Electron Cyclotron Resonance Plasma Using Nitrogen Gas in the Mirror Magnetic Field
- Parameters Measurement of ECR Silane Plasma
- Three-Dimensional Simulation of Microwave Propagation in an Electron Cyclotron Resonance Plasma