Role of Electron Thermal Motion in Evanescent Electromagnetic Wave Structure of Inductively Coupled Plasma
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概要
- 論文の詳細を見る
The role of electron thermal motion in radio-frequency (RF) plasma produced by a planar, spiral antenna was examined. The measured evanescent wave amplitude and the phase were compared to the calculated results obtained from a one-dimensional collisionless (nonlocal) model, changing the boundary condition, Ar filling pressure and RF frequency. It was demonstrated that electron thermal motion plays a more important role under the condition of low collisionality.
- 社団法人応用物理学会の論文
- 1999-02-01
著者
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Shinohara Shunjiro
Interdisciplinary Graduate School Of Engineering Science Kyushu University
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Takechi Seiji
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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