Extreme Ultraviolet Resist Fabricated Using Water Wheel-Like Cyclic Oligomer with Pendant Adamantyl Ester Groups
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概要
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The synthesis and properties of water wheel-like cyclic oligomer (noria\text{PY) derivatives (noria\text{PY-ADs) with pendant adamantyl ester (AD) groups were examined for their application as extreme ultraviolet (EUV) resist materials. Noria\text{PY-ADs with various degrees of introduction (DI values) of AD groups were synthesized by adjusting the reactant feed ratios and reaction concentration. Solubility, film-forming property, and thermal stability were consistent with differences in DI values. The patterning properties of noria\text{PY-AD25 (\mathrm{DI}= 25%) were examined in an EUV resist system, and noria\text{PY-AD25 provided a clear line-and-space pattern with 30 nm resolution and a line width roughness (LWR) of 11.3 nm.
- 2011-12-25
著者
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Kudo Hiroto
Department Of Applied Chemistry Faculty Of Engineering Kanagawa University
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Nishikubo Tadatomi
Department Of Applied Chemistry Faculty Of Engineering Kanagawa University
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Itani Toshiro
Semiconductor Leading Edge Technol. Ibaraki Jpn
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Seki Hiroyuki
Department Of Applied Chemistry Graduate School Of Engineering Kanagawa University
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Oizumi Hiroaki
Semiconductor Leading Edge Technol. Inc. Ibaraki Jpn
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Oizumi Hiroaki
Semiconductor Leading Edge Technologies, Inc. (Selete), Research Department 3, Tsukuba, Ibaraki 305-8569, Japan
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Nishikubo Tadatomi
Department of Material and Life Chemistry, Faculty of Engineering, Kanagawa University, Yokohama 221-8686, Japan
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Kudo Hiroto
Department of Material and Life Chemistry, Faculty of Engineering, Kanagawa University, Yokohama 221-8686, Japan
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Seki Hiroyuki
Department of Material and Life Chemistry, Faculty of Engineering, Kanagawa University, Yokohama 221-8686, Japan
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