A Scanning Total Reflection Method for Refractive-Index Profiling
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概要
- 論文の詳細を見る
A simple index-distribution measurement method using scanning total reflection (STR) is presented. On the basis of preliminary experiments, its accuracy confirmed to be 0.1% with a spatial resolution of 2 $\mu$m. Further considerations show that the theoretical limits of these values can be better than 0.01% and 1 $\mu$m, respectively. The results of rod lenses measured by the STR method and the interference method coincided well, and good measurement reproducibility was confirmed. The index profile of a planar microlens was measured and the result was found to coincide with a theoretically predicted result.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-08-20
著者
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Iga Kenichi
Tokyo Institute Of Technology
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Zhu Xiaofan
Tokyo Institute of Technology, Research Laboratory of Precision Machinery & Electronics, 4259 Nagatsuta, Midori-ku, Yokohama 227
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