Effects of Hydrogen Dilution Ratio on Properties of Hydrogenated Nanocrystalline Cubic Silicon Carbide Films Deposited by Very High-Frequency Plasma-Enhanced Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
We have successfully deposited nanocrystalline cubic silicon carbide (nc-3C-SiC:H) films at a low substrate temperature of 360 °C by very high-frequency plasma-enhanced chemical vapor deposition using monomethylsilane and hydrogen. Spectroscopic ellipsometry revealed that the crystalline volume fraction of the films increased from 69 to 92% with increasing hydrogen dilution ratio from 100 to 500. We found that the dark conductivity of the films was strongly affected by the crystalline volume fraction. A high deposition rate of 0.15 nm/s was achieved under a low hydrogen dilution ratio of 100.
- Japan Society of Applied Physicsの論文
- 2007-07-25
著者
-
Miyajima Shinsuke
Department Of Physical Electronics Tokyo Institute Of Technology
-
Konagai Makoto
Department Of Electrical & Electronic Engineering Tokyo Institute Of Technology
-
Yamada Akira
Quantum Nanoelectronics Research Center Tokyo Institute Of Technology
-
Sawamura Makoto
Department of Physical Electronics, Tokyo Institute of Technology, 2-12-1-S9-9 O-okayama, Meguro-ku, Tokyo 152-8552, Japan
関連論文
- A chronic myeloid leukemia patient with atypical karyotype and BCR-ABL e13a3 transcript caused by complex chromosome rearrangement
- Novel In(OH)_3:Zn^ Buffer Layer for Cu(InGa)Se_2 Based Solar Cells
- Effect of ZnTe and CdZnTe Alloys at the Back Contact of 1-μm-Thick CdTe Thin Film Solar Cells
- Phosphorous Doping of Strain-Induced Si_C_y Epitaxial Films Grown by Low-Temperature Chemical Vapor Deposition
- Preferred Orientation Control of Cu(In_Ga_x)Se_2 (x≈0.28) Thin Films and Its Influence on Solar Cell Characteristics
- P-Doping into Strain-Induced Si_C_y Epitaxial Films Grown by Low Temperature Chemical Vapor Deposition
- Epitaxial Growth of γ-In_2Se_3 Films by Molecular Beam Epitaxy
- Epitaxial Growth of Si_C_y Film by Low Temperature Chemical vapor Deposition
- Formation of pn Homojunction in Cu(InGa)Se_2 Thin Film Solar Cells by Zn Doping
- Amorphous-to-Polycrystalline Silicon Transition in Hot Wire Cell Method
- Improvement of the Electrochemical Profiling Technique of Carrier Concentration in Cu(InGa)Se_2 Thin Film Solar Cells
- Clinical Application of Bone Marrow Implantation in Patients With Arteriosclerosis Obliterans, and the Association Between Efficacy and the Number of Implanted Bone Marrow Cells
- Potential Candidates for Cardiac Resynchronization Therapy in Japanese Patients With Idiopathic Dilated Cardiomyopathy : A Niigata Multicenter Study of DCM
- PJ-284 Effect of Nicorandil on Arterial Wall Stiffness in Patients with Ischemic Heart Disease(Atherosclerosis, Clinical 3 (IHD) : PJ48)(Poster Session (Japanese))
- Fenofibrate, a Peroxisome Proliferator-Activated Receptor α Activator, Suppresses Experimental Autoimmune Myocarditis by Stimulating the Interleukin-10 Pathway in Rats
- High-Efficiency Amorphous Silicon Solar Cells with ZnO as Front Contact
- Improvement of Stabilized Efficiency of Amorphous Silicon Solar Cell by SiH_2Cl_2 Addition
- Imatinib Mesilate Inhibits Neointimal Hyperplasia via Growth Inhibition of Vascular Smooth Muscle Cells in a Rat Model of Balloon Injury
- Bridging Collateral from an Internal Mammary Arterial Graft to a Coronary Artery
- PJ-532 Cardiac Myocytes in Myocarditis Markedly Increase Gene Expression of Anti-angiogenic Protein Endostatin(Myocarditis, basic/clinical-2, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- OJ-179 Asialoerythropoietin is a Hopeful Drug for Angiogenesis Therapy(Regeneration (angiogenesis / myocardial regeneration)-2, The 71st Annual Scientific Meeting of the Japanese Circulation Society)
- PJ-711 The Effect of Asialoerythropoietin on Angiogenesis(Regeneration (angionenesis/myocardial regeneration)-7 (M) PJ119,Poster Session (Japanese),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulation Society)
- PJ-274 Factor Analysis for Predicting the Prognosis of Ischemic Limbs after Cell Therapy(Peripheral circulation-7 (H) PJ46,Poster Session (Japanese),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulation Society)
- Erythroid Cells Play a Central Role in Angio/vasculogenesis in Bone Marrow Implantation (Molecular Biology, Vascular 2 (H), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- Dramatic Increase of Pancreatitis Associated Protein(PAP) Expression in Cardiomyocytes in Acute Phase of Experimental Autoimmune Myocarditis (Myocarditis, Basic/Clinical 2 (M), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- Erythropoiesis Induced Angiogenesis In Vitro(Angiogenesis 4 (M), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- Left Ventricular Mechanical Restitution of Patients with Chronic Heart Failure(Heart Failure, Clinical 18 (M), The 69th Annual Scientific Meeting of the Japanese Circulation Society)
- PJ-371 Enhancing Effect of Erythropoietin on Neovascularization by Implantation of Bone Marrow Cells in Vivo(Angiogenesis 3 (IHD) : PJ62)(Poster Session (Japanese))
- OJ-265 Erythropoiesis Induced Angiogenesis in Vitro(Angiogenesis 2 (M) : OJ31)(Oral Presentation (Japanese))
- OJ-184 Serum Erythropoietin Level Was a Sensitive Marker of Limb Ischemia Receiving Implantation of Bone Marrow Mononuclear Cells(Peripheral Circulation/Vascular Disease 1 (H) : OJ21)(Oral Presentation (Japanese))
- A rare case of Graves' disease during regular hemodialysis
- FR167653 improved the Progression of the Experimental Autoimmune Myocarditis by suppressing IL-1 β production
- Gene therapy on EAM with pCAGGS plasmid encoding SLPI/IgG_1Fc chimera
- Characterization of Highly Efficient CdTe Thin Film Solar Cells by the Capacitance-Voltage Profiling Technique
- Improvement in Performances of ZnO : B/i-ZnO/Cu(InGa)Se_2 Solar Cells by Surface Treatments for Cu(InGa)Se_2
- Electrical and Structural Characterizations of Cu(InGa)Se_2 Thin Films Using Electrochemical Capacitance-Voltage Method and Focused-Ion Beam Process
- Cu(InGa)Se_2 Thin-film Solar Cells with High Resistivity ZnO Buffer Layers Deposited by Atomic Layer Deposition
- Prospects of Thickness Reduction of the CdTe Layer in Highly Efficient CdTe Solar Cells Towards 1 μm
- Molecular Beam Epitaxy and Characterization of Layered In_2Se_3 Films Grown on Slightly Misoriented (001)GaAs Substrates
- Heteroepitaxy and Multiquantum Well Structure of Layered Compound GaSe/GaS_xSe_ on (001) GaAs Substrate
- Characterization of Highly Efficient CdTe Thin Film Solar Cells by Low-Temperature Photoluminescence
- Characterizaiton of ZnIn_xSe_y Thin Films as a Buffer Layer for High Efficiency Cu(InGa)Se_2 Thin-Film Solar Cells
- Characterization of Tensile Strained Si_1_yCy Alloy Grown by Photo- and Plasma Chemical Vapor Deposition at Very Low Temperature
- Native Defect Control of CdTe Thin Film Solar Cells by Close-Spaced Sublimation
- Evaluation of Candidates of Biventricular Pacing Therapy in Idiopathic Dilated Cardiomyopathy
- -0902-ELECTROPHYSIOLOGIC ASSESSMENT OF SUSTAINED VENTRICULAR TACHYCARDIA ASSOCIATED WITH IDIOPATHIC DILATED CARDIOMYOPATHY : THE 54th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
- -0901-ELECTROPHYSIOLOGICAL ABNORMALITIES AT THE REENTRANT CIRCUIT IN SUSTAINED VENTRICULAR TACHYCARDIA : THE 54th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY
- Photoluminescence Studies and Solar-Cell Application of CuInSe_2 Thin Films Prepared using Selenization Techniques
- Photoluminescence Study of CuInSe_2 Thin Films Prepared by the Selenization Technique
- Study of CuInSe_2 Formation Kinetics in the Selenization Process by Raman Spectroscopy
- Developmemt of High-Efficiency CuIn_xGa_Se_2 Thin-Film Solar Cells by Selenization with Elemental Se Vapor in Vacuum
- Heteroepitaxy of Layered Compound InSe and InSe/GaSe onto GaAs Substrates
- InGaP/GaAs Heterojunction Bipolar Transistors with an Ultra-High Carbon-Doped Base (p=1.5×10^cm^)
- Low Temperature Growth of Heavily Carbon-Doped GaAs by Metalorganic Molecular Beam Epitaxy with Elemental Gallium
- Characterization of Carbon-Doped GaAs Grown by Molecular Beam Epitaxy Using Neopentane as Carbon Source
- Carbon δ-Doping in GaAs by Metal-Organic Molecular Beam Epitaxy
- Structural Aspects of Heavily Carbon-Doped GaAs Grown by Metalorganic Molecular Beam Epitaxy (MOMBE)
- GaAs Pseudo-Heterojunction Bipolar Transistor with a Heavily Carbon-Doped Base
- P-Type Carbon-Doped InGaAs Grown by Metalorganic Molecular Beam Epitaxy
- GaAs PN Diodes with Heavily Carbon-Doped P-Type GaAs Grown by MOMBE
- Theoretical Analysis of Heavy Doping Effects on AlGaAs/GaAs HBT's
- Heavily Carbon-Doped P-Type InGaAs Grown by Metalorganic Molecular Beam Epitaxy
- Severe Cryoglobulinemia in a Patient with Asymptomatic Hepatitis C Virus Infection
- VENTRICULAR TACHYCARDIA WITH TWO POSSIBLE EXITS FROM ONE RE-ENTRANT CIRCUIT
- Abnormal fatty acid matabolism in patients with coronary vasospasm
- Myocardial CD36 expression and fatty acid accumulation in patients with type I and II CD36 deficiency
- 0649 EVALUATION OF THE SYMPATHETHIC NERVE ACTIVITY IN PATIENTS BY ^-I-MIBG CARDIAC UPTAKE AND SPECTRAL ANALYSIS OF HEART RATE VARIABILITY
- P647 Relationship among Abnormal Left Ventricular Regional Wall Motion, Myocardial Fatty Acid Metabolism and Myocardial Sympathetic Denervation in Vasospastic Angina
- P418 THE CORRELATION BETWEEN IMPAIREMENT OF MYOCARDIAL FATTY ACID METABOLISM AND MAGNESIUM DEFFICIENCY IN PATIENTS WITH SUSPECTED VASOSPASTIC ANGINA.
- Preparation of Nanocrystalline Silicon in Amorphous Silicon Carbide Matrix
- TiO_2-Coated Transparent Conductive Oxide (SnO_2:F) Films Prepared by Atmospheric Pressure Chemical Vapor Deposition with High Durability against Atomic Hydrogen
- Microcrystalline Silicon Films and Solar Cells Prepared by Photochemical Vapor Deposition on Textured SnO_2 with High Haze Factors
- -0270-RATE ACCELERATION OF VENTRICULAR TACHYCARDIA DURING PHARMACOLOGICAL THERAPY WITH SUCCESSFUL RATE CONTROL
- Hypertrophic Cardiomyopathy With Type I CD36 Deficiency
- P586 DELAYED ADVERSE REACTION TO NONIONIC CONTRAST MEDIA AT CARDIAC CATHETERIZATION
- High Quality Aluminum Oxide Passivation Layer for Crystalline Silicon Solar Cells Deposited by Parallel-Plate Plasma-Enhanced Chemical Vapor Deposition
- Molecular Rotation in an Antiferroelectric Liquid Crystal Studied by ^C-Nuclear Magnetic Resonance Spin-Lattice Relaxation Time Measurement
- A Bent and Asymmetrically Hindered Chiral Alkyl Chain in Smectic-A Phase of an Antiferroelectric Liquid Crystal as Observed by ^2H-NMR
- ZnO Films with Very High Haze Value for Use as Front Transparent Conductive Oxide Films in Thin-Film Silicon Solar Cells
- Optimization of p-Type Hydrogenated Microcrystalline Silicon Oxide Window Layer for High-Efficiency Crystalline Silicon Heterojunction Solar Cells
- Boron-doped Microcrystalline Silicon Oxide Film for Use as Back Surface Field in Cast Polycrystalline Silicon Solar Cells
- Optimization of Amorphous Silicon Oxide Buffer Layer for High-Efficiency p-Type Hydrogenated Microcrystalline Silicon Oxide/n-Type Crystalline Silicon Heterojunction Solar Cells
- Characterization of Undoped, N- and P-Type Hydrogenated Nanocrystalline Silicon Carbide Films Deposited by Hot-Wire Chemical Vapor Deposition at Low Temperatures
- Effect of Hydrogen Dilution on the Metastability of Hydrogenated Amorphous Silicon Oxide Solar Cells
- Clinical value of assessing the response to imatinib monitored by interphase FISH and RQ-PCR for BCR-ABL in peripheral blood for long-term survival of chronic phase CML patients : results of the Niigata CML-multi-institutional co-operative clinical study
- Fabrication of Microcrystalline Cubic Silicon Carbide/Crystalline Silicon Heterojunction Solar Cell by Hot Wire Chemical Vapor Deposition
- Low-Temperature Deposition of Highly Conductive n-Type Hydrogenated Nanocrystalline Cubic SiC Films for Solar Cell Applications
- Preparation of Microcrystalline Germanium Carbon Thin Films by Hot-Wire Chemical Vapor Deposition Using Dimethylgermane
- Quantitative Analysis of Surface Morphology of Boron-Doped Zinc Oxide for Microcrystalline Silicon Solar Cells
- Highly Conductive Boron Doped Microcrystalline Si Films Deposited by Hot Wire Cell Method and its Application to Solar Cells
- Photoluminescence from Silicon Quantum Dots in Si Quantum Dots/Amorphous SiC Superlattice
- Effect of Plasma Power on Structure of Hydrogenated Nanocrystalline Cubic Silicon Carbide Films Deposited by Very High Frequency Plasma-Enhanced Chemical Vapor Deposition at a Low Substrate Temperature
- Properties of Hydrogenated Microcrystalline Cubic Silicon Carbide Films Deposited by Hot Wire Chemical Vapor Deposition at a Low Substrate Temperature
- Preparation of Hydrogenated Amorphous Silicon Carbon Nitride Films by Hot-Wire Chemical Vapor Deposition Using Hexamethyldisilazane for Silicon Solar Cell Applications
- Effects of Hydrogen Dilution Ratio on Properties of Hydrogenated Nanocrystalline Cubic Silicon Carbide Films Deposited by Very High-Frequency Plasma-Enhanced Chemical Vapor Deposition
- Improvement of Electrical Properties of Silicon Quantum Dot Superlattice Solar Cells with Diffusion Barrier Layers
- Hydrogenated Amorphous Silicon Oxide Solar Cells Fabricated near the Phase Transition between Amorphous and Microcrystalline Structures
- Deposition of Ag(In,Ga)Se
- Improvement of Electrical Properties of Silicon Quantum Dot Superlattice Solar Cells with Diffusion Barrier Layers (Special Issue : Solid State Devices and Materials)
- Preparation of Nanocrystalline Silicon in Amorphous Silicon Carbide Matrix