1138 加速度センサーの衝撃解析(G03-2 材料力学(2)計測2,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

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This paper describes the impact analysis of an acceleration sensor. The analysis was performed to examine the deformation behavior of the acceleration sensor after an impact. In concrete terms, finite element method analysis software LS-DYNA was used. The relationship between damping rate and the deformation behavior of the sensor by the critical damping modulus was examined. Moreover, the transforming behavior of a 3 dimension model was examined about an axial symmetric model. And, tensile tests of silicon plates were performed to examine tensile strengths. It is confirmed that the analytical model should be examined continuously by comparing the analytical stress occurring in the membrane and the tensile strength of silicon.
2008-08-02