フェムト秒レーザ・ダブルパルス加工による非対称表面を用いたマイクロパーツの輸送(機械力学,計測,自動制御)

概要

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Femtosecond laser technology has the ability to form stable minute grating structures on various materials, including silicon and stainless steel. By forming a periodic structure on a surface where contacts parts, the tribology characteristics can be improved, because the effect of adhesion decreases as the contact area reduces. Application of a double-pulsed femtosecond laser irradiation can generate periodic structures with asymmetric profiles. We previously showed that microparts, such as ceramic chip capacitors and resistors, can be fed along asymmetric surfaces using simple planar symmetric vibrations. Microparts move in one direction because they adhere to these surfaces asymmetrically. In this study, we tested the ability of an asymmetric surface microfabricated by the double-pulsed femtosecond laser irradiation to feed 0402 capacitors (size, 0.4×0.2×0.2mm; weight, 0.1mg). Among the characteristics evaluated were the differences in profiles of the two inclined surfaces, the effect of decreased adhesion, the coefficient of friction in both the forward and the backward directions, and the friction angle of the 0402 capacitors in both directions. Using the results of feeding experiments of these capacitors, we assessed the feeding velocity and the feeding stability. Simulating microparts feeding using dynamics including adhesion based on measurements, we studied validity of the dynamics derived.
2009-12-25