2P1-C19 非対称な形状を有する表面によるサビミリサイズマイクロパーツの水平対称振動輸送 : フェムト秒レーザ・ダブルパルス加工表面とマイクロパーツの接触解析(ナノ・マイクロ作業システム)

概要

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We previously showed that microparts can be fed along a saw-toothed surface using simple planar symmetric vibrations. Microparts move forward because they adhere to the saw-toothed surface asymmetrically. We used saw-toothed silicon wafers fabricated by a dicing saw applying bevel type blades. We then studied the movement of 2012-type capacitors (size: 2.0 × 1.2 × 0.6 mm, weight: 7.5 mg) and 0603-type capacitors (size: 0.6 × 0.3 × 0.3 mm, weight: 0.3 mg). In this study, we assessed the movement of smaller 0402-type capacitors (size: 0.4 × 0.2 × 0.2 mm, weight: 0.1 mg). A femtosecond laser process was used to fabricate an asymmetric surface. We evaluated asymmetry of the fabricated surface based on measurements using an atmic force microscope (AFM). Profile models of both the fabricated surface and a 0402-type capacitor were approximated by polynominals. We then examined contacts between these models and also asymmetry of contact by calculating contact area that acts adhesion.
一般社団法人日本機械学会の論文
2008-06-06