高配向Nd_2Fe_<14>B薄膜のX線回折と磁気特性

概要

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Nd_2Fe_<14>B thin films were fabricated with a DC magnetron sputtering system. X-ray diffraction experiments and the Rietveld analysis showd that the crystallites of the Nd_2Fe_<14>B phase were highly oriented perpendicular to the film plane. In addition to the diffraction peaks originated from the Nd_2Fe_<14>B phase, we observed extra reflections that can be assigned as a NdO phase. The relative intensity, hence the volume fraction of the NdO phase varied depending on the sputtering conditions such as the substrate temperature, Ar gas pressure, and Ta buffer layer thickness. It was found that the magnetization value depends strongly on the Ar gas pressure and reaches a maximum at 0.7Pa of Ar gas pressure. The maximum magnetization value is 15kG, which is comparable with the bulk value. The optimized values of the maximum energy product, saturation magnetization, and coercivity are (BH)_<max>=36MGOe, 4πM_s=14.7kG, and H_c=6.7kOe, respectively.
社団法人日本磁気学会の論文
2008-11-01