20711 直動外乱のフィードフォワードによる大型・軽量化除振台の振動制御(機械工学が支援する半導体製造技術(II),OS13 機械工学が支援する半導体薄膜製造技術)

概要

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This paper proposes a control method against a direct disturbance acted on an active isolation system with a low stiffness and lightweight isolation table. A large-size isolation table needs to reduce the weight per size, and then multi vibration modes appear on the isolation table in lower frequency region. For controlling the multi-mode vibration, the 5-DOF lumped mass model using a reduced order physical modeling method and LQ control theory are adapted. In order to control the direct disturbance on the table, a feed forward controller is designed. Usefulness of proposed modeling method and controller is confirmed through experimental results.
一般社団法人日本機械学会の論文
2005-03-17