301 付加物の振動を考慮した軽量化除振台の 3 次元アクティブ制御

概要

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This paper presents an active isolation system with a lightweight table and multi modes of vibration. Then the lightweight isolation table becomes more flexible, causing the appearance of elastic multiple modes. Therefore, a control system should be designed which takes into account multiple modes. In this paper, the reduced order physical model proposed by Seto is used for designing controller an active isolation system with an elastic table and multi modes of vibration. For controlled system design, LQ control theory and double-active control method with feed-forward control are applied. Moreover, the effectiveness of the method is demonstrated through simulation and experiment. And, the effectiveness of the system with LQ control theory is verified through simulation when an addition structure is installed in lightweight isolation table.
社団法人日本機械学会の論文
2003-10-30