Lithography Simulator for Electon Beam/Deep UV Intra-Level Mix & Match

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関連論文

Skin Permeation of Parabens in Excised Guinea Pig Dorsal Skin, Its Modification by Penetration Enhancers and Their Relationship with n-Octanol/Water Partition Coefficients
Charge Disproportionation in Highly One-Dimensional Molecular Conductor TPP[Co(Pc)(CN)_2]_2(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
Giant Negative Magnetoresistance Reflecting Molecular Symmetry in Dicyano (phthalocyaninato) iron Compounds (Condensed Matter: Electronic Structure, Electrical, Magnetic and Optical Properties)
Contribution of Degenerate Molecular Orbitals to Molecular Orbital Angular Momentum in Molecular Magnet Fe(Pc)(CN)_2(Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
Improved Electron-Beam/Deep-Ultraviolet Intralevel Mix-and-Match Lithography with 100 nm Resolution
Fabrication of Micro-Marks for Electron-Beam Lithography
Fabrication Process of Character Projection Mask for EB Lithography
Anisotropic Thermal Diffusivity and Conductivity of YBCO(123) and YBCO(211) Mixed Crystals. II
Anisotropic Thermal Diffusivity and Conductivity of YBCO(123) and YBCO(211) Mixed Crystals. I
Simultaneous Measurement of Thermal Diffusivity and Conductivity Applied to Bi-2223 Ceramic Superconductors
Development of An Accurate Optical Proximity Correction System for 1 Gbit Dynamic Random Access Memory Fabrication
Proximity Effect Correction For Electron Beam Lithography: Highly Accurate Correction Method
50 nm Pattern Etching of Si Wafer by Synchrotron Radiation Excited CF_4 Plasma
Recovery of SEM Image by In-Situ Cleaning of Contaminated Objective Aperture
Reduction of Electron Beam Drift Caused by Deflecting Electrode by Downflow Cleaning Process
Thermal Decomposition of Dissolution Inhibitor in Chemically Amplified Resist during Prebake Process
F390B and C, New Antitunmor Dihydroxanthone Derivatives Isolated from penicillium sp.
Edge Roughness Study of Chemically Amplified Resist in Low-Energy Electron-Beam Lithography Using Computer Simulation
Contamination Charging up Effect in a Variably Shaped Electron Beam Writer
Electron Beam Calibration Method for Character Projection Exposure System EX-8D
A Dual-Gate Complementary Metal-Oxide-Semiconductor Technology with Novel Self-Aligned Pocket Implantation which Takes Advantage of Elevated Source/Drain Configurations
Self-Aligned Pocket Implantation into Elevated Source/Drain MOSFETs for Reduction of Junction Capacitance and Leakage Current
Parasitic Resistance Reduction in Deep Submicron Dual-Gate Transistors with Partially Elevated Source/Drain Extension Regions Fabricated by Complementary Metal-Oxide-Semiconductor Technologies
Lithography Simulator for Electon Beam/Deep UV Intra-Level Mix & Match
Advantage of Shallow Trench Isolation over Local Oxidation of Silicon on Alignment Tolerance
Charge-reducing Effect of Chemically Amplified Resist in Electron-Beam Lithography
Protection of Field Oxide in Trench Isolation against Contact Hole Etching to Improve Alignment Tolerance
Microwave Studies of Electron Scattering by Isolated Interstitial Oxygen and Oxygen Complex in Silicon
Fracto-Emission from Glass Fibre Reinforced Plastics at 170-200 K : Exoemission Associated with Mechanical Treatments
Measurements of Photostimulated Electron Emission from Super conducting Metals at 9-300 K : Exoemission Mechanism and Related Phenomena
Haliangicin, a Novel Antifungal Metabolite Produced by a Marine Myxobacterium : 2. Isolation and Structural Elucidation
Inhibition of DNA Topoisomerases by Nidulalin A Derivatives
Uptake of Enalapril by Rabbit Small Intestinal Brush-Border Membrane Vesicles
pH-Dependent Inhibitory Effects of Angiotensin-Converting Enzyme Inhibitors on Cefroxadine Uptake by Rabbit Small Intestinal Brush-Border Membrane Vesicles and Their Relationship with Hydrophobicity and the Ratio of Zwitterionic Species
Inhibitory Effects of Angiotensin-Converting Enzyme Inhibitors on Cefroxadine Uptake by Rabbit Small Intestinal Brush Border Membrane Vesicles
Isolation of Isoeugenitin as a Fruiting Body Inducer for Stigmatella aurantiaca from a Soil Fungus Papulaspora sp.
Optimization of a High-Performance Chemically Amplified Positive Resist for Electron-Beam Lithography
Noticeable Enhancement of Edge Effect in Short Channel Characteristics of Trench-Isolated MOSFETs
Anomalous Gate Length Dependence of Threshold Voltage of Trench-Isolated Metal Oxide Semiconductor Field Effect Transistors
Narrow-Channel Metal Oxide Semiconductor Field Effect Transistor (MOSFET)Isolated by an Ultra-Fine Trench
Inhibition and Promotion Efficiency of bis-Phenol Type Dissolution Inhibitors during Development
High Performance Chemically Amplified Positive Electron-Beam Resist:Optimization of Base Additives for Environmental Stabilization
A Cylindrical Multi-Layer Drift Chamber for a Low-Energy pp Experiment
Fabrication of 0.2 μm Hole Patterns in KrF Excimer Laser Lithography
Enhancing Effect of N-Dodecyl-2-pyrrolidone on the Parcutaneous Absorption of 5-Fluorouracil Derivatives
Absorption of Methochlorpromazine in Rat Small Intestinal Everted Sac
Uptake of Doxifluridine by Rabbit Small Intestinal Brush-Border Membrane Vesicles
Development Process for Chemically Amplified Resist by KrF Imaging

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