Direct Observation of Al_xGa_<1-x>As/GaAs Superlattices by REM
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概要
- 論文の詳細を見る
Cleavage surface of Al_xGa_<1-x>As/GaAs superlattices were observed by reflection electron microscopy using a conventional transmission electron microscopy, and cross sections of the superlattices were clearly shown as stripe patterns. Strain fields around the superlattice were revealed in a REM image. The irregularities in superlattice layers caused by roughness of a substrate surface were found to be relaxed in successive layers.
- 社団法人応用物理学会の論文
- 1984-10-20
著者
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MUTO Shunichi
Fujitsu Laboratories Ltd.
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Muto Shunichi
Fujitsu Limited
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YAMAMOTO Naoki
Physics Department,Tokyo Institute of Technology
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Yamamoto Naoki
Physics Department Tokyo Institute Of Technology
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