Reduction of Dislocation Density in GaAs/Si by Strained-Layer Superlattice of In_xGa_<1-x>As-GaAs_yP_<1-y>
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1987-07-20
著者
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Mizuguchi Kiyoshi
Semiconductor Group Mitsubishi Electric Corporation
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Hayafuji Norio
Optoelectronic And Microwave Devices R & D Laboratory Mitsubishi Electric Corporation
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Hayafuji Norio
Optoelectronic And Microwave Devices R&d Laboratory Mitsubishi Electric Corporation
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NISHIMURA Takashi
LSI R&D Laboratory, Mitsubishi Electric Corp.
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MIZUGUCHI Kazuo
LSI R&D Laboratory, Mitsubishi Electric Corp.
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HAYAFUJI Norio
LSI R&D Laboratory, Mitsubishi Electric Corp.
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MUROTANI Toshio
LSI R&D Laboratory, Mitsubishi Electric Corp.
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Nishimura Tadashi
Lsi Research & Development Laboratory Mitsubishi Electric Corporation
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Nishimura T
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Mizuguchi Kazuo
Optoelectronic And Microwave Devices R&d Laboratory Mitsubishi Electric Corporation
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Murotani T
Mitsubishi Electric Corp. Hyogo
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Niina T
Microelectronics Research Center Sanyo Electric Co. Ltd.
関連論文
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- Reduction of Dislocation Density in GaAs/Si by Strained-Layer Superlattice of In_xGa_As-GaAs_yP_
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