Deposition of Sr_xLa_<2-x>CuO_<4-y> Thin Films by Sputtering
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1987-04-20
著者
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MURATA Keizo
Electrotechnical Laboratory
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TOKUMOTO Madoka
Electrotechnical Laboratory
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IHARA Hideo
Electrotechnical Laboratory
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TERADA Norio
Electrotechnical Laboratory
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HIRABAYASHI Masayuki
Electrotechnical Laboratory
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Murata K
Tokyo Medical And Dental Univ. Tokyo Jpn
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Murata Keizo
Electorotechnical Laboratory
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SENZAKI Kiyoshi
Electrotechnical Laboratory
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Hirabayashi M
Electrotechnical Laboratory
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KIMURA Youichi
Electrotechnical Laboratory
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Tokumoto Madoka
Electronics and Photonics Research Institute (EPRI), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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