On the Reaction Scheme for Ti/TiN Chemical Vapor Deposition (CVD) Process Using TiCl_4

スポンサーリンク

概要

著者

関連論文

Optimally Stable Electron Cyclotron Resonance Plasma Generation and Essential Points for Compact Plasma Source
Multi-Coil System for Electron Cyclcotron Resonance Plasma Generation
Uniform Electron Cyclotron Resonance Plasma Generation for Precise ULSI Patterning
Dependence of Electron Cyclotron Resonance Plasma Characteristics on Introduced Microwave Conditions
Theoretical Calculation of Photoabsorption of Various Polymers in an Extreme Ultraviolet Region
Structural and Electrical Characterization of SrTiO_3 Thin Films Prepared by Metal Organic Chemical Vapor Deposition
Multivacancy and Its Hydrogen Decoration in Crystalline Si
Evidence for Creation of Gallium Antisite Defect in Surface Region of Bleat-Treated GaAs
The Role of Gallium Antisite Defect in Activation and Type-Conversion in Si Implanted GaAs
First-Principles Calculations on Mg Impurity and Mg-H Complex in GaN
Highly Reliable Ultra-Thin Tantalum Oxide Capacitors for ULSI DRAMs (Special Issue on Quarter Micron Si Device and Process Technologies)
Trends in Capacitor Dielectrics for DRAMs (Special Issue on LSI Memories)
Measurement of Charge Distributions in Organic Photoconductor Using Pulse Ultrasonic Wave : Acoustical Measurements and Instrumentation
Measurement of Electric Field Dsitributions in Solid Dielectrics Using Ultrasonic Waves : Acoustical Measurements and Instrumentation
Effect of Ion Doping Process on Thin-Film Transistor Characteristics Using a Bucket-Type Ion Source and XeCl Excimer Laser Annealing
Large-Area Doping for Poly-Si Thin Film Transistors Using Bucket Ion Source with an RF Plasma Cathode
On the Reaction Scheme for Ti/TiN Chemical Vapor Deposition (CVD) Process Using TiCl_4
Effects of Applied Magnetic Fields on Silicon Oxide Films Formed by Microwave Plasma CVD : Nuclear Science, Plasmas and Electric Discharges
X-Ray Fluorescence Analysis of Hg in SiO_2 Films Deposited by Hg-Sensitized Photo-CVD
Theoretical Studies on the Dielectric Breakdown of the SiO_2 Thin Films
Leakage Current Reduction of Poly-Si Thin Film Transistors by Two-Step Annealing
Targeting the Development of a Virtual Microscope
Large-Area Doping Process for Fabrication of poly-Si Thin Film Transistors Using Bucket Ion Source and XeCl Excimer Laser Annealing
Silicon Selective Epitaxial Growth over Thick SiO_2 Islands
Facet Formation in Selective Silicon Epitaxial Growth
Device Layer Transfer Technique using Chemi-Mechanical Polishing
Crystalline Defects in Selectively Epitaxial Silicon Layers
Theoretical Study of the Surface Reaction Mechanism of GaN with HCl
Recent Development of Multireference Density Functional Theory
Copper Adsorption Behavior on Silicon Substrates (Special Issue on Sub-Half Micron Si Device and Process Technologies)
New Concerted Mechanism of the Cl-Removal Reaction Induced by H_2 in Chloride Atomic Layer Epitaxy
Determination of Spatial Electric Field/Charge/Potential Distributions in Polymer Film Using an Acoustic Step-Wave Probing Technique

もっと見る

スポンサーリンク