Dry Etching Damage and Activation Ratio Degradation in δ-Doped AlGaAs/InGaAs High Electron Mobility Transistors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-02-15
著者
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KUDO Makoto
Central Research Laboratory, Hitachi, Ltd.
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Kudo M
Hitachi Ltd. Tokyo Jpn
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TANIMOTO Takuma
Central Research Laboratory, Hitachi, Ltd.
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Kudo Makoto
Central Research Lab. Hitachi Ltd.
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MORI Mitsuhiro
Central Research Laboratory, Hitachi Ltd.
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KODERA Hiroshi
Fiberoptics Projects Division, Hitachi Ltd.
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Kodera Hiroshi
Fiberoptics Projects Division Hitachi Ltd.
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Mori Mitsuhiro
Central Research Laboratory Hitachi Ltd.
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Tanimoto Takuma
Central Research Laboratory Hitachi Ltd.
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- Dry Etching Damage and Activation Ratio Degradation in δ-Doped AlGaAs/InGaAs High Electron Mobility Transistors
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