Production of 35 keV, 1 A Steady-State Ion Beam

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1986-11-20

著者

• Uchida T

  Institute For Semiconductor Technologies Ulvac Inc.

• Uchida Tajiro

  Institute For Semiconductor Technologies Ulvac Inc.

• Ota Kazuya

  Aset Euvl Laboratory

• Ota Kazuya

  System Designing Section Designing Department Industrial Supplies & Equipment Division Nikon Cor

• Uchida T

  Mitsubishi Electric Corp. Hyogo Jpn

• Uchida Taijiro

  Department Of Nuclear Engineering Faculty Of Engineering University Of Tokyo

• NIHEI Hitoshi

  Department of Quantum Engineering and systems Science, School of Engineering, the University of Toky

• MORIKAWA Junji

  Department of Nuclear Engineering, Faculty of Engineering, The University of Tokyo

• Inoue Nobuyuki

  Department of Nuclear Engineering, University of Tokyo

• Uchida Taijiro

  Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo:(present Address) I

• Ota K

  Univ. Tsukuba Ibaraki Jpn

• ISHIDA Shinichi

  Department of Nuclear Engineering, Faculty of Engineering, the University of Tokyo

• OTA Kanji

  Department of Nuclear Engineering, Faculty of Engineering, the University of Tokyo

• Nihei H

  Univ. Tokyo Tokyo Jpn

• Nihei Hitoshi

  Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo

• Inoue N

  School Of Engineering University Of Tokyo

• Inoue Nobuyuki

  Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo

• Morikawa Junji

  Department Of Nuclear Engineering Faculty Of Engineering The University Of Tokyo

• Ishida Shuichi

  Division Of Cardiovascular Medicine Department Of Internal Medicine Ohmori Hospital Toho University

• Ota Keishin

  Tsukuba Advanced Research Alliance Center University Of Tsukuba

• Inoue N

  Univ. Tokyo Tokyo

• Inoue Nobuyuki

  Department Of Cardiovascular Surgery Kitasato University School Of Medicine

• Ishida Shinichi

  Department of Nuclear Engineering, Faculty of Engineering University of Tokyo

• MORIKAWA Junji

  Department of Advanced Energy, Graduate School of Frontier Sciences, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan

関連論文

• Roles of Excess Atoms in Electronic and Magnetic Properties of Fe_V_Z (Z = Al, Ga)
• High Spin Polarizaion of Ferrimagnetic Heusler-type Alloys in Mn-Cr-Z System (Z=IIIb, IVb, Vb Elements)(Condensed matter: electronic structure and electrical, magnetic, and optical properties)
• High spin polarization of ferrimagnetic half-Heusler compounds FeCrZ and MnYZ (Y = Mn, Cr ; Z = 3b, 4b, 5b elements)
• Electronic Structure and Structural Transformation of Co_Ni_Al (x = 0, ±1/2)
• Electronic Structure and Magnetic Properties of Ferromagnetic Shape Memory Alloys CoNiAl
• Antiferromagnetism and Atomic Disorder in Fe_2 VSi (Condensed Matter : Electronic Structure, Electrical, Magnetic and Optical Properties)
• Factors for Predicting Cardiac Events in Patients with Stable Dilated Cardiomyopathy : Usefulness of 123I-MIBG Myocardial Scintigraphy
• Geometrical Effect of Mcrogroove Surface on Aligment of Liquid Crystal Molecules (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
• Geometrical Effect of Mcrogroove Surface on Alignmert of Liquid crystal Molecules
• Experiment on Deflection of High-Speed Plastic Pellets Using Curved Guide Tubes
• Improvement of Field Emission Characteristics by Fabricating Aligned Open-Edged Particle-Free Carbon Nanotubes : Semiconductors
• Metal Nanocrystals Grown by Vacuum Deposition on Aligned Carbon Nanotubes
• Usefulness of ^I-metaiodobenzylguanidine myocardial scintigraphy in the prediction of cardiac events in patients with cardiomyopathy showing stabilization of symptoms or preserved cardiac function
• Usefulness of ^I-BMIPP Myocardial SPECT in Predicting Restenosis in the Chronic Phase of Unstable Angina Pectoris with Early Stage PCI
• Usefulness of I-123MIBG Myocardial Scintigraphy for Predicting Cardiac Events in Patients with Dilated Cardiomyopathy Receiving Long-Term β-Blocker Treatment
• Magnetic Multipole Field Generated by Columns of Permanent Magnets Arranged on a Cylindrical Surface
• Photoproton Spectrum from ^V
• Photoproton Spectra from ^Cu and ^Cu
• Band Theory of Super-Lattice Fe_3Al
• Numerical Studies on Ergodization Effect of Externally-Applied Helical Field
• Time-Asymptotic Behavior of Incompressible Plasmas : Condensed Matter and Statistical Physics
• Helically Assisted Low-q Tokamak with l=2 Helical Winding
• On the Quasi-Static Evolution of Two-Dimensional Plasmas : Condensed Matter and Statistical Physics
• Study of Beam Divergence of a Low-Energy (1-3 keV) Ion Source
• Optimization Studies on the Plasma Position Control System in TORIUT-4 Tokamak
• Computer Simulation of Ion Beam Extraction by Finite Element Method
• Experiments on Runaway Electrons in a Toroidal Plasma
• Particle Simulation of Relativistic Charged Beams Using Integral Kernel Method
• Second Order Effect of a High-β Tokamak Equilibrium
• Grain Boundary Structure and Bandtail Transport in High Mobility Poly-Si TFTs
• Variable-Range Hopping in Polycrystalline Silicon Thin-Film Transistor
• Electrical Conductions of High Mobility Poly-Si Thin Film Transistors at Low Temperatures
• Etching Characteristics of Organic Polymers in the Magnetic Neutral Loop Discharge Plasma
• Investigations of Surface Reactions in Neutral Loop Discharge Plasma for High-Aspect-Ratio SiO_2 Etching
• Enhancement of Impurity Influx Due to the Dynamo Action in RFP Plasma
• Development of Proton Detection System with Thin Ruby Scintillator Insensitive to Neutrons and Gamma Rays for Neutron Lifetime Measurement
• Modeling of In-Plane Distortion of Extreme Ultraviolet Lithography Mask in Flat State
• Thermal In-Plane Distortion Model of Mask for Extreme Ultraviolet Lithography during Periodic Scanning Exposure
• Estimation of Extreme Ultraviolet Power and Throughput for Extreme Ultraviolet Lithography
• Transport Simulation of JT-60U L-Mode Discharges
• Design of a Sawtooth-Free Plasma in an Inductively-Operated Pulsed Tokamak Reactor
• Temperature Dependence of the Inelastic Scattering Time in Metallic n-GaAs
• Determination of Physical Parameters of the Anderson Localization in Metallic n-InSb
• Effects of the Anderson Localization on Magnetoconductivity in Metallic n-GaAs
• Metallic Nanocrystals Formation from Metal-Oxide Nanocrystals via Evaporation Process
• Intensity Variation of Transition Radiation Induced by Adsorption of Nitrogen on W(100) Surface
• Emission of Radiation Induced by Bombardment of Slow Electrons from a Clean (100) Surface of Tungsten
• New Alignment Sensors for Optical Lithography : Lithography Technology
• New Alignment Sensors for Optical Lithography
• Production of 35 keV, 1 A Steady-State Ion Beam
• 3D-Computer Simulation of Ion-Beam Deflection Caused by the Displacement of Extraction Electrodes
• EVALUATION OF THE TILTED HOMEOTROPIC ALIGNMENT OF LIQUID-CRYSTAL MOLECULES USING THE RUBBING METHOD
• A Double-Layer Electrically Controlled Birefringence Liquid-Crystal Display with a Wide-Viewing-Angle Cone
• Tilted Homeotropic Alignment of Liquid-Crystal Molecules Using the Rubbing Method
• Alignment of Liquid Crystals on a Ferroelectric Transparent Ceramic Plate : L: LIQUID CRYSTALS
• Alignment of Ferroelectric Liquid Crystals on a Ferroelectric Transparent Ceramic Plate : L: Liquid Crystals
• Analyses of Plasma Flux and Density Distribution in Plasma Sources Surrounded by Magnetic Multipole Fields
• Control of Surface Reaction on Highly Accurate Low-k Methylsilsesquioxane Etching Process : Nuclear Science, Plasmas, and Electric Discharges
• Magnetic Neutral Loop Discharge (NLD) Plasma and Application to SiO_2 Etching Process
• 1.3 μm InGaAs/InAlGaAs Strained Quantum Well Lasers on InGaAs Ternary Substrates
• Transmission Conditions of Vibration Stresses to Welding Specimens of Ultrasonic Plastic Welding using Various Two-Vibration-System Equipments
• Dry Etch Process in Magnetic Neutral Loop Discharge Plasma
• High-Current Runaway Electron Beam in a Tokamak Plasma
• In_Ga_AS/InAlGaAs/InGaP Strained Double Quantum Well Lasers on In_Ga_As Ternary Substrate
• Spin Arrangement and Electronic Structure of Mn_3MC(M=In and Sn)
• Control of Liquid Crystal Aligment Using Stamped-Morphology Method
• Orientation of Polymer Molecules in Rubbed Alignment Layer and Surface Anchoring of Liquid Crystals
• Cooling of Ultracold Neutrons by Propagating Magnetic Field
• Search for Half-Metallic Compounds in Co_2MnZ (Z=IIIb, IVb, Vb Element)
• A Half-Metallic Band Structure and Fe_2MnZ (Z=Al, Si, P)
• Electronic and Magnetic Properties of X_2Mn_V_xSi (X=Fe and Co)
• Spin Arrangement and Electronic Structure of Mn_3GaX (X=C and N)
• Band Calculations for MnZn and MnHg Fixing Local Spin Directions
• Band Calculations for Non-Collinear Spin Arrangements in Gamma-Phase Manganese-Iron Alloys
• Optically Compensated Bend Mode (OCB Mode) with Wide Viewing Angle and Fast Response (Special Issue on Liquid-Crystal Displays)
• Relationship between Rubbing Strength and Surface Anchoring of Nematic Liquid Crystal
• Relation between Rubbing Strength and Surface Anchoring of Nematic Liquid Crystal
• Microwave Plasma Source for Ion Sources with Multipolar and Axial Magnetic Fields
• Asymmetric Perturbations of Toroidal Flux in Ramped-Up Discharges on Repute-1 Reversed Field Pinch
• Quasistatic 2-D MHD Equilibrium Calculations for Oscillating-Current RFP Plasmas
• Selective Acceleration of NBI-injected Fast Ions by Ion Cyclotron Wave in a Tokamak Plasma
• Remarkes on Relaxation Phenomena in Toroidal Discharge
• Computer Simulation of Ion Beam Extraction from a Free Plasma Surface
• Discrete Energy Levels of Neutrons Trapped in an Absolute Minimum-B Mirror Field
• Computer Simulation of Ion Beams for the Design of Three-Electrode Ion Extraction System
• Confinement of Ultra-COld Neutrons in RFP Magnetic Configuration
• Photoluminescence of Eu-Doped ZnO Phosphors
• Stacked Optical Disk Drive for Multimedia Files : Drive Technology
• Stacked Optical Disk Drive for Multimedia Files
• Measurement of the Density Profile of a Toroidal Non-neutral Plasma with a Wall-Probe Array
• Characteristics of Two-Vibration-System Ultrasonic Plastic Welding with 90 kHz and 20 kHz Vibration Systems at Right Angles
• Density Distributions in Cylindrical and Rectangular Plasma Sources
• Analytic Expressions of Magnetic Multipole Field Generated by a Row of Permanent Magnets
• Density Distributiorn in a Plasma Source with Cylindrical Configuration
• Neutral Particle and Plasma Density Distributions in a Processing Plasma Source
• "m = 3" Instabilities Observed for an Azimuthal Pinched Plasma
• Ultra-low-q discharges in REPUTE-1.
• Development of Proton Detection System with Thin Ruby Scintillator Insensitive to Neutrons and Gamma Rays for Neutron Lifetime Measurement
• First Plasma in the RT-1 Device
• Estimation of Extreme Ultraviolet Power and Throughput for Extreme Ultraviolet Lithography

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